微摩擦测试仪的研制

Development of the Testing Apparatus for Micro-Friction

微机械构件表面的微摩擦不同于宏观摩擦,也不同于原子力/摩擦力显微镜探针与基片之间的微摩擦,因此,宏观或微观摩擦实验仪器对于微摩擦的研究有很大的局限.本文从实际出发,设计并研制了考虑微机械工况的销盘式微摩擦测试仪及其数据处理系统,采用微应变片获取摩擦力及载荷导致的变形信号,通过A/D卡采集数据,在数据处理系统中进行数据处理,从而获得微摩擦力和微载荷的数值,为微摩擦特性测试和分析提供一种手段.

The apparatus for researching macro or micro friction in existence is not very suitable to (research) micro-friction,because the micro-friction of surfaces in micro-devices is not the same as macro-friction or the micro-friction between the probe and the slice in AFM/FFM.This paper introduces a head-disk micro-friction testing apparatus produced by the authors.Since the load and friction may bring on distortion of reeds,this testing apparatus uses four strain gages to gain the signal.Then it collects data by A/D card and (disposes) them with the software programmed by the authors.Moreover,the friction and load may revert to type in the software.