微压式液位传感器热灵敏度漂移的补偿

Thermal sensitivity shift compensation of micropressure liquid level transducer

介绍了微压式液位传感器的工作原理、总体结构设计及热灵敏度漂移的补偿技术与方法,给出了补偿结果,验证了补偿技术与方法的有效性和可行性,为提高硅压阻式传感器的温度稳定性与准确度提供了一种实用有效的新方法。

The principle,design of structure and thermal sensitivity shift compensation technique of micropressure liquid level transducer are introduced.The compensation result is presented,and its validity and feasibility are verified.A new method to improve temperature stability and dectection accuracy of silicon piezoresistive sensor is provided.