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具有隔离结构的横向接触式体硅微机械继电器 被引量:4

A Bulk Micromachined Relay with Lateral Contact and Isolation Structure
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摘要 介绍了一种横向接触式体硅微机械继电器。这种继电器采用硅 玻璃键合及深刻蚀(DRIE)工艺加工 ,并利用多晶硅填槽形成隔离结构。继电器采用静电激励 ,横向驱动。分析了继电器静电激励的阈值电压 ,介绍了一种在有限元仿真工具ANSYSTM 下用降解模型 (ROM)分析阈值电压的方法 。 A bulk micromachined relay with lateral contact and isolation structure is presented.The relay is fabricated with glass/silicon wafer bonding and deep reactive ion etching (DRIE)process.Refilled polysilicon trenches are used as isolation structure.It is laterally driven with electrostatic actuator.The threshold voltage of the relay is simulated using Reduced Order Modeling(ROM) methods provided by a general finite element simulator,ANSYS TM.The simulated result and experimental result are compared and discussed.
出处 《北京大学学报(自然科学版)》 CAS CSCD 北大核心 2004年第3期397-401,共5页 Acta Scientiarum Naturalium Universitatis Pekinensis
基金 国家自然科学基金 (60 3 0 60 0 8) 863计划 (2 0 0 3AA40 40 13 ) 国家重点基础发展规划"集成微光机电系统研究"基金(G19990 3 3 10 9)资助项目
关键词 微机电系统 微型继电器 有限元仿真 耦合分析 降解模型 microelectromechanical system(MEMS) microrelay finite element analysis(FEA) coupled analysis reduced order modeling(ROM)
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参考文献8

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同被引文献32

  • 1张宇峰,张鹏飞,李德胜,王东宏.基于MEMS技术的微型电磁继电器的研究[J].仪器仪表学报,2001,22(z2):333-334. 被引量:5
  • 2许高斌.MEMS表面微加工工艺技术[J].测控技术,2006,25(4):26-29. 被引量:4
  • 3尤政,李慧娟,张高飞.MEMS微继电器及其关键问题研究现状[J].压电与声光,2006,28(3):278-281. 被引量:8
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