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加速度系统的结点化模型仿真 被引量：2

Nodal Model Simulation of an Accelerometer
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摘要 利用在ZeniVDE平台下建立的梁、平板质量、集总质量、气隙、压膜阻尼和锚点等结点化基本单元模型 ,对一种电容式加速度计系统进行了一系列的仿真 ,仿真内容包括静态仿真 ,时域仿真和频域仿真等。 A capacitive accelerometer is simulated using the basic nodal model of components such as beam, plate mass, lumped mass, gap, squeeze film damper and anchor, which are implemented under ZeniVDE TM. The simulation includes static, time domain and frequency domain simulation. The simulation result is in good coincidence with the experiment result and simulation result of ANSYS, a general FEA simulator.
作者 肖志勇 杨振川 张海霞 郝一龙
机构地区 北京大学微电子学研究院
出处 《北京大学学报（自然科学版）》 CAS CSCD 北大核心 2004年第3期432-436,共5页 Acta Scientiarum Naturalium Universitatis Pekinensis
基金 国家自然科学基金 (60 3 0 60 0 8) 863计划 (2 0 0 3AA40 40 13 ) 国家重点基础发展规划"集成微光机电系统研究"基金(G19990 3 3 10 9)资助项目
关键词 VHDL-AMS 结点化设计 MEMS CAD 模拟混合信号 VHDL-AMS modal design MEMS CAD analog & mixed signal
分类号 TH703 [机械工程—精密仪器及机械]
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参考文献8

  • 1PRIME Faraday Partnership.An Introduction to MEMS.Loughborough University,ISBN 184402007X.2002
  • 2Senturia S D.CAD Challenges for Microsensors,Microactuators,and Microsystems.Proceedings of the IEEE,1998 86 (8):1611-1626
  • 3Tilmans H A C.Equivalent Circuit Representation of Electromechanical Transducers:I.Lumped-Parameter Systems.J Micromech Microeng,1996,6 (1):157-176
  • 4Tilmans H A C.Equivalent Circuit Representation of Electromechanical Transdu cers:II.Distributed-Parameter Systems.J Micromech Microeng,1997,7 (4):285-309
  • 5Zhou Yong.Layout Synthesis of Accelerometers:[Master Thesis].Department of Electrical and Computer Engineering,Carnegie Mellon University,1998
  • 6Christen E,Bakalar K,Dewey A M,et al.Analog and Mixed-signal Modeling Using the VHDL-AMS Language.In:The 36th Design Automation Conference VHDL-AMS Tutorial.New Orleans:1999,102.http://tech.www.informati.uni-hamburg.de/vhd l/doc/p1076.1/tutdac99.pdf
  • 7Dewey A,Hanna J,Hillman B,et al.VHDL-AMS Modeling Considerations and Styles for Composite Systems.In:Tech Repversion 2.0.Defense Advanced Research Projects Agency (DARPA) 1999,18～25.http://www.jat.co.ur/eda/saber/model.g.pdf
  • 8Xiao Zhixiong,Chen Min,Wu Guoying,et al.Silicon Micro-Accelerometer withmg Resolution,High Linearity and Large Frequency Bandwidth Fabricated with Two Mask Bulk Process.Sensors and Actuators A:Physical,1999,77 (2):113～119

共引文献1

同被引文献24

  • 1霍鹏飞,苑伟政,马炳和.MEMS惯性传感器的系统级建模技术研究[J].西北工业大学学报,2004,22(4):403-407. 被引量：4
  • 2单光宝,刘佑宝,魏海龙.硅微加速度计的建模与仿真[J].功能材料与器件学报,2006,12(5):399-403. 被引量：1
  • 3SENTURIA S D. CAD challenges for microsensors, microactuators, and microsystems [C]. Proceedings of the IEEE, 1998,86 (8) : 1611 - 1626.
  • 4SCHWARZ P, HAASE J. Behavioral modeling of complex heterogeneous microsystems [C]. Proc. 1st Intern. Forum on Design Languages ( FDL ' 98 ), Lausanne: Swiss Federal Institute of Technology, 1998,2:53-62.
  • 5JAKOVLJEVIC M, FOTIU P, MRCARICA Z, et al.. A system-level simulation of complex multidomain mierosystems by using analogy hardware description languages [J]. Sensors and Actuators A, 2002,82:30-39.
  • 6MUKHERJEE T, FEDDER G K,RAMASWAMY D, et al.. Emerging simulation approaches for micromachined devices [J]. IEEE Transactions on Computer-aided Design of Integrated Circuits and Systems, 2000,19(12) :1572-1589.
  • 7ZHOU G Y,PHILIP D. A method to include micromechanical components into the system leve simulation [J]. Sensors and Actuators A, 2002,97 98:386-397.
  • 8TILMANS H A C. Equivalent circuit representation of electromeehanical transducers: Ⅰ. Lumpedparameter systems[J]. J. Micromech. Microeng, 1996,6:157-176.
  • 9TARIK B,JEAN-PAUI. G. Modeling micropumps with electrical equivalent networks[J]. J. Micro mech. Microeng, 1996,6:398-404.
  • 10WANG Y Q,CHEN H L, HE X M. System-level modeling and simulation for an electrostatic-feedback micro-accelerometer based on equivalent electrical representation [J]. Micorsystem Technologies, 2007,13:613-624.

引证文献2

二级引证文献3

北京大学学报（自然科学版）
2004年 第3期

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