Ge_xSi_(1-x)/Si应变层和超晶格及其临界厚度

Ge_xSi_(1-x)/Si Strained Layer Superlattices and Their Critical Layer Thickness

异质外延层的性能和质量,往往取决于异质结构的特性。文章讨论了Ge_xSi-(1-x)/Si 应变层和应变层超晶格中的应变、位错和临界厚度,并比较了实验结果。

The characteristics and quality of hetercepitaxial layer are depen- dent on the properties of the heterostructure.In this paper,the strain,dis- locations and critical layer thickness of Ge_xSi_(1-x)/Si strained layer superlatti- ces are discussed and comparison cf experimental results is made.