一种改进石榴石磁光膜(盘)性能的新型热处理技术的研究

Study on New Technique of Rapidly Recurrent Post-annealing to Garnet M-O Film(Disc)

本文给出了一种快速周期退火这一新技术。用它对 RF 磁控溅射法制备的石榴石磁光膜进行热处理光学均匀性变好,晶粒尺寸减小(30nm),法拉第效应增强,矫顽力增大。膜结构的 X 射线衍射分析表明,多周期退火的样品仅呈现单相石榴石,较少周期退火的样品除石榴石相外,还有 DyFeO_3相析出。对上述结果作了理论分析。

A new technique of rapidly recurrent post-annealing is reported in this paper.Using the technique,we have obtained a high quality film which exhibits smooth surface,fine crystallisation and excellent Faraday effect.The x-ray diffrac- tion analysis showed that there existed only single garnet phase for the multi-recur- rent samples whereas DyFeO_3 phase was also separarted out in less recurrent sam- pies,except the garnet phase.The theoretical analysis is carried out on the men- tioned above.