离子注入的特殊应用

Some Special Applications of Ion Implantation

描述了离子注入的几个特殊应用,其中包括离子束退火效应,增加肖特基势垒高度,注入吸杂效应,合成 SiO_2膜及离子注入材料改性等。

A number of special applications of ion implantation are described such as ion beam annealing(IBA)effect,the enhancement of Schottky barrier height,gettering effect,the synthesis of SiO_2 films,and an improvement on proper- ties of the materials,etc.