用于光纤陀螺的LiNbO_3集成光学器件

LiNbO_3 Integrated Optical Components for Fiber Optic Gyroscopes

本文报道用于光纤陀螺(FOG)的LiNbO_3集成光学(IO)器件及其技术。介绍制作LiNbO_3波导的扩散和质子交换两种技术,叙述了国内外近年研制和生产的FOG用多功能集成光学芯片及LiNbO_3相位调制器,给出了它们的结构、性能和封装(光纤耦合)技术。对国内外发展状况的综述表明,在这个技术领域,国内研制的器件的性能,已接近国外80年代末的水平。

LiNbO_3 in tegrated optical(IO)components and technology for fiber optic gyroscopes(FOG)both at home and abroad are reported in this paper.Tech- nologies of Ti-diffusion and proton exchange are introduced,followed by description of FOG multifunction IO chips and LiNbO_3 phase modulators,along with their structures,performances and packaging(fiber coupling).It is shown that the per- formances of the components made in China are nearly as high as those made in some western developed countries.