SOI技术及其应用

SOI and Its Aplications

综述在氧化物绝缘层上生长硅技术(SOI)的优点、特性、制作技术,以及实际应用。肯定了SOI结构在半导体电路和器件研制、生产中具有重要的发展前景。指明了这是解决半导体电路和器件在各种辐射粒子影响和高温下工作时高可靠性的一个全新的技术任务。

This paper introduces properties, superiority, technology and practical use of new structure SOI. It is confirmed in this work that SOI technology has a bright future in the area of development and production of semiconductor circuits and devices. It is indicated that with this technology, high reliablility can be achieved for semicoductor circuits and devices even under the influence of radiant particles and operating at high temperature.