诱导透射干涉滤光片中银膜厚度和性能

Study on Thickness and property of Thin Silver Film in Induced Transmission Filter

银膜的性能和厚度直接影响诱导透射滤光片(简称ITF)的性能和指标。在设计和镀制ITF时,确定适当的镀膜厚度尤为重要。本文的主要工作是:用结构分析和光谱分析法,得到在衬底温度100℃时,膜厚大于25nm的银膜呈多晶状态,且其结构接近于大块银料。首次确定出用于ITF中银膜的下限厚度为32nm,并给出了镀制过程中理论监控曲线和实测监控曲线。

Thickness and property of thin Ag film have an effect on the charac- teristics of induced transmission filter (ITF). It is of great impotrance to determine the thickness of thin Ag film during the design and coating of ITF. It is shown that with the thickness of more than 25nm, thin Ag film appears as multiple crystal and its structure is more or less the same as the bulk silver at substrate temperature 100℃. It is found that the lower limit of the film thickness is 32nm. The theoretical and measuved monitoring curves during the coating are given.