摘要
介绍了与标准工艺加工线(Foundry)工艺相容的功率MMIC制造工艺、毫米波PHEMT MMIC foundry工艺的最新进展和遇到的问题。此外,还给出了用稳定的foundry工艺获得的结果。
A foundry compatible power MMIC production technology, recent progress of mm-wave PHEMT MMIC foundry processes and problems encountered are presented. The results obtained with stabilized foundry processes are given.
出处
《半导体情报》
1993年第3期30-36,共7页
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