摘要
讨论了最近研制成功的新型大量程长程面形仪(LTP)中精密线性导轨扫描、定向移动以及高精度任意步长等运动的控制;采用面阵CCD获取准直激光束通过位相板形成的衍射图像、经采集卡数字化,由计算机完成数据处理。数据处理中实现了MATLAB与VC++程序间的通信,采用质心法分离测量光斑以及参考光斑,并利用MATLAB中神经网络算法求取位相板衍射图像中暗线位置,达到了设计要求的精度。
The control of linear guided stage and image capturing system in the novel Long Trace Profiler (LTP) are discussed. Diffraction pattern capturing and data processing are completed through Area Scan CCD camera, frame grabber and computer. Communication between the Matlab and VC++ is established. The measuring pattern and reference pattern are separated by the law of centroidal method. Higher precision of the light spot determination is obtained using Neural Networks Algorithms.
出处
《核技术》
CAS
CSCD
北大核心
2004年第7期511-514,共4页
Nuclear Techniques
基金
中国科学院仪器研制和改造项目
关键词
面阵CCD
线性导轨
位相板
质心法
衍射图像
Area Scan CCD camera, Linear guided stage, Phase plate diffraction, Centroidal method, Diffraction picture
