摘要
为解决现有的MEMS微波开关的激励电压太高、微连接和膜开关的击穿电压等问题,提出了一种独特结构的MEMS微波开关—扭转臂杠杆式膜开关,并对其进行了理论分析,用conventorware和ADS(ad vanceddesignsystem)软件进行了仿真。由于利用了膜结构以及扭转臂和杠杆的原理,这种独特的MEMS微波开关激励电压比较低、隔离度较高、插入损耗比较低、稳定性好。
To solve the problems of the high actuation voltage,joint of microstructure and puncture voltage of current MEMS microwave switches,a MEMS microwave switch with unique structure is proposed—MEMS membrane switch using torsion spring and leverage.It has been theoretically analyzed and simulated by using conventor ware and ADS(advanced design system).As utilizing principle of torsion spring and leverage,the unique MEMS microwave switch has low actuation voltage,high isolation,low insertion loss and good stability.
出处
《传感器技术》
CSCD
北大核心
2004年第7期71-73,共3页
Journal of Transducer Technology
关键词
MEMS膜
隔离度
插入损耗
共面波导
MEMS membrane
isolation
insertion loss
coplanar waveguide
