聚二甲基硅氧烷微流体芯片的制作技术

Fabrication technology of polydimethylsiloxane microfluidic chip

基于MEMS技术的微流体芯片在分析化学和生物医学领域显示了巨大的应用潜力。作为构建微流体芯片的基底材料———聚二甲基硅氧烷(PDMS)已经表现出了许多的优点:良好的电绝缘性、较高的热稳定性、优良的光学特性以及简单的加工工艺等。采用浇注法制作了PDMS电泳微芯片,对PDMS微流体芯片的加工工艺、封装方法和结构特征进行了探讨,并提出了相应的解决方案。

Microfluidic chips based on MEMS technology exhibit great potentials in analytical chemistry and biomedical fields.As a substrate material for building microfluidic chips,polydimethylsiloxane(PDMS)shows a lot of advantages,including good insulating properties,high thermal stability,excellent optical characteristic and simple fabrication process.PDMS electrophoresis microchip is fabricated using casting method.The fabrication process,sealing methods and structure characteristic of PDMS microfluidic chips are discussed,and the corresponding solutions are also presented.