摘要
讨论了通过低温加压精馏(-60℃、2 0MPa)除去四氟化碳中六氟乙烷等氟碳杂质,以达到4N级四氟化碳对氟碳杂质浓度的要求。
The method how to remove carbon fluoride impurities, for example ethane hexafluoride (C_(2)F_(6)), from raw carbon tetrafluoride (CF_(4)) in a medium-pressure and low-temperature (-60 ℃,2.0 MPa) rectification column is discussed in this paper. By virtue of this rectification, the total mole percentage of carbon fluoride impurities can satisfy the criterion of carbon tetrafluoride N 4.0 .
出处
《低温与特气》
CAS
2004年第2期21-24,共4页
Low Temperature and Specialty Gases
关键词
四氟化碳
低温加压精馏
氟碳杂质
carbon tetrafluoride
medium-pressure and low-temperature rectification
carbon fluoride impurities
