摘要
本文报导了对一种新的多位相分束器二元光学元件的优化设讨.二元光学元件一个周期中的每个单元的相位值和坐标都作为优化过程中的评价函数的变量.模拟结果表明,这种新的多相位分束器与只用每个单元的相位值作为优化过程中评价函数的变量的分束器相比,具有较高的衍射效率和较低的相对误差.本文还分析了影响制作多位相分束器二元光学元件的一些因素.
In this paper a novel Multilevel Phase Kinoform(MPK)based on binary optics elements for beam splitter is presented.Both phase values asso- ciated with each kinoform cell and coordinates of transition points can be used as variables of merit function in optimization procedure of the MPK.The optimal algorithm is the simulated annealing algorithm.Simulation results show that this MPK has higher diffraction efficiency and lower relative error than the MPK with uniform cell size does.Some parameters that affect fabrication of MPK,such as finite resolution and aceuracy of etching depth,are analyzed.
基金
国家自然科学基金
关键词
分束器
衍射光栅
集成光学元件
beam splitters
diffraction gratings/binary optics elements
