大口径等离子炬与金刚石沉积工艺研究

The Development Of Greater Diameter Plasma Torch And The Process Of Diamond Deposition

研制了一种大喷口直径的等离子炬.等离子焰直径可达25mm。利用该等离子炬在氩气—氢气—石油液化气体系中进行了系统的工艺参数试验,获得了质量较高的金刚石膜。简要论述了其应用前景。

A greater diameter plasma torch is developed,which can produce a plasma arch of upto 25mm in diameter.A series of experiments have been done in a system of Ar-H_2-Liquified petroleum gas,and higher quality diamond films are obtained.The prospective applications are also discussed.