激光诱导沉积技术及其应用

Laser Induced Deposition Technologies and Their Applications

介绍近年发展起来的激光诱导沉积技术,包括激光化学气相沉积、激光物理气相沉积、激光增强电镀和激光诱导化学镀等。概述这些工艺的原理、方法及其应用前景。

The recently developed laser induced deposition technologies were introduced,including laser chemical vapour deposition,laser physical vapour deposition,laser enhanced electroplating and laser induced electroless plating etc.The principles,methods and applications of these technolo- gies were also explained briefly.