摘要
采用真空镀膜技术制备TiO2与TiO2∶MgF2薄膜湿敏元件,仔细研究了薄膜湿敏元件的感湿特性.结果表明:掺杂适量MgF2的TiO2∶MgF2薄膜湿敏元件,工作频率为100Hz时,在全湿度范围内具有良好的阻抗-湿度特性,感湿特性曲线线性良好;元件具有灵敏度高,滞后小,响应快,长期稳定性好等优点.
The humidity-sensitive elements of TiO_2 and TiO_2∶MgF_2 thin films have been prepared by the vacuum coating technique. The humidity-sensing properties of the elements have been studied. The results show that the elements' impedance (Z) versus relative humidity (RH) values have excellent characteristics in the humidity range tested, and the curves of log(Z) ～ RH% show excellent linearity at frequency of 100 Hz. The elements also have many advantages of high sensitivity, small hysteresis, rapid responsibility and great stability over time.
出处
《福建师范大学学报（自然科学版）》
CAS
CSCD
2004年第2期49-51,共3页
Journal of Fujian Normal University：Natural Science Edition
基金
国家自然科学基金资助项目(20273014)
福建省教育厅重点项目(JA02138)
关键词
湿敏
薄膜
二氧化钛
氟化镁
humidity sensor
thin film
TiO_2
MgF_2
