超精密加工中的微位移技术

Micro-displacement Technique in the Ultra-precision Machining

微位移技术是实现超精密加工的重要途径 ,据此介绍了微位移的实现方法 ,并对压电陶瓷微位移机构系统作了进一步的介绍 ,阐述了系统的组成、工作原理、结构及特点 .最后进行了采用MCS - 5 1系列单片机控制的压电陶瓷微位移机构闭环控制系统来提高工件的面形精度的实验 .结果表明 ,工件的面形精度提高了 5 0

Micro-displacement technique is the important track to realize the ultra-precision machining. This paper introduces the method of realizing micro-displacement, and gives more introduction to the system of piezodectic ceramics micro-displacement mechanism. The system's working principle,structure,characteristics are showed. Finally, an experiment is done adopting piezodectic ceramics micro-displacement mechanism closed-loop controlling system controlled by MCS-51 single-chip computer to advanced workpiece's surface form precision. The result indicated that the workpiece's surface form precision advanced over 50%.