摘要
对目前已研制出的多种光电位敏元件及位置测量方法进行了系统的归纳分类,并结合作者本人的研究工作,对这些方法进行了综合评述。
Photoelectronic position measurement has evolved into an important study field. Manykinds of photoelectriic position detectors have been developed and many methods for positiondetecting advanced. A summary discussing these detectors and methods is given in this paper.