摘要
在MEMS领域 ,微梁广泛应用于各种器件及材料参数的提取中 ,但是由表面微加工工艺制成的单层台阶型锚 ,往往不能使微梁满足理想固支的边界条件 ,从而给器件设计和材料参数的提取带来较大的误差 .为了解决这一问题 ,文中提出了一种结构新颖的锚 ,经Coventorwear软件模拟表明 ,该锚能提供接近理想固支的边界条件 .
In MEMS community,micro-beams are often used to extract material properties or build various devices,but the typical step-up anchors obtained from surface-micromachined process are not often well-defined fixed-ends.In order to get perfect fixed-ends,a novel anchor is presented which can be manufactured only by modifying layout,and no modification in the fabrication process is necessary.
关键词
表面微加工
固支边界条件
锚
版图
surface micromachining
fixed-end boundary condition
anchor
layout
