一种提高光栅投影轮廓术精度的方法

A method for improving precision of profilometry with projecting grating

在光栅投影三维轮廓术中,直接条纹位移分析法存在着垂直条纹方向分辨率低的缺点。在分析产生低分辨率原因的基础上,提出移物法,该方法通过多次移动物体来提高测量的采样精度。测量结果表明,在不提高对光栅投影系统的要求的情况下,对物体移动N次分别进行测量,每次移动的距离为条纹宽度的1/(N +1),这样就可以使得测量精度提高N倍。

Among all methods of 3-D profilometry with projecting grating, direct fringe displacement analysis has the fault of low resolution in vertical fringe direction. Based on the analysis for reason of low resolution, a moving-object method is proposed. The method improves sampling accuracy through moving object for N times. The measurement results show that on condition of without increasing demands for projecting grating system and carrying out measurements through moving object for N times, each moving distance for 1/(N+1) of fringe width, the measuring accuracy can be improved by a factor of N.