摘要
用磁控溅射方法制备出纳米二氧化钛(TiO2)薄膜,对制膜的工艺参数进行了详细的测试分析.X射线衍射(XRD)分析表明退火温度提高,TiO2薄膜结晶度增加,800℃下退火2h,TiO2薄膜完全转化为金红石结构,其分子式为Ti8O15,出现氧空位.
Nano-titanium dioxide (TiO_2) thin films are fabricated by magnetron sputtering method, and the preparing parameters are investigated in detail. X-ray diffractometer (XRD) shows that crystalline phase appear with increatsing of annealing temperature. The film transfers to rutile structure completely when the annealing temperature gets to 800℃, and its molecular formulas is Ti_8O_(15).
出处
《暨南大学学报（自然科学与医学版）》
CAS
CSCD
2004年第3期293-296,301,共5页
Journal of Jinan University(Natural Science & Medicine Edition)
基金
广东省自然科学基金资助项目(021169)
广州市科技攻关计划项目(2003Z3-D2011)
关键词
磁控溅射
TIO2薄膜
热处理
晶相转变
magnetron sputtering
titanium dioxide thin films
annealing
crystal phase transfer
