摘要
在基材上将不同的纳米构件,如纳米点、纳米柱、纳米管、纳米球等图案化的过程是制作实用器件的先期必备步骤。常见的构建方法有光刻方法、纳米压印和铸模成型工艺、扫描探针显微镜(SPM)写入技术及模板法。模板法最吸引人的地方在于可以将模板的结构特征转移到基板表面,从而获得与模板具有相似形貌的表面图案。与光刻法(尤其是电子束和聚焦离子束刻蚀)和SPM相比,模板法适合于制造大规模有序表面结构阵列,省时且设备成本低。本文主要介绍基于PS、SiO2等微球模板的表面图案化技术,并对近年来各类图案化器件在分析化学上的应用进行了回顾。
Patterning different nano components on the substrate, such as nano dots, nano columns, nano tubes, nano spheres and so on, is an essential step in the fabrication of practical devices. The common construction methods include lithography, nano imprinting and mold forming process, scanning probe microscope (SPM) writing technology and template-based method. The most attractive aspect of the template-based method is that the structural features of the template can be transferred to the substrate surface, so as to obtain the surface pattern with similar morphology to the template. Compared with photolithography (especially electron beam and focused ion beam etching) and SPM techniques, template method is suitable for manufacturing large-scale ordered surface structure arrays, which is time-saving and low equipment cost. This paper mainly introduces the surface patterning technology based on PS, SiO2 and other microsphere templates, and reviews the application of various patterned devices in analytical chemistry in recent years.
出处
《分析化学进展》
2021年第4期229-236,共8页
Advances in Analytical Chemistry
