摘要
氯气是一种重要的工业气体,广泛应用于集成电路、半导体、光伏等电子工业领域。氯气也是一种剧毒性、强腐蚀性的黄绿色气体,人体长期接触会引起呼吸道的严重损伤。本文基于差分吸收光谱技术研制了一套氯气在线监测系统,用于工业过程中氯气浓度的在线测量,监测数据可用于生产、治理过程控制,可以减少氯气的排放。
Chlorine gas is an important industrial gas widely used in electronic industries such as integrated circuits, semiconductors, and photovoltaics. Chlorine gas is also a highly toxic and corrosive yellow-green gas, and long-term exposure to it can cause serious damage to the respiratory tract. This article develops an online monitoring system for chlorine gas based on differential absorption spectroscopy technology, which is used for online measurement of chlorine gas concentration in industrial processes. The monitoring data can be used for production and governance process control, which can reduce chlorine gas emissions.
出处
《应用物理》
2023年第11期421-429,共9页
Applied Physics
