MEMS热膜壁面剪应力传感器标定技术研究现状

Research Status of Calibration Method of MEMS Hot-Film Wall Shear Stress Sensor

流体壁面剪应力的测量对于流动减阻,湍流结构机理研究等方面都具有重要的作用,MEMS壁面剪应力传感器为壁面剪应力的测量提供了一种准确有效的手段。首先介绍了热膜型的MEMS壁面剪应力传感器的测量原理及发展现状;其次着重分析了热膜型的MEMS壁面剪应力传感器的静态和动态标定方法,静态标定方法可分为基于速度,基于流量和基于压力的方法,动态标定方法通常采用斯托克斯层激励方法;最后对标定技术进行了归纳总结及展望。

The measurement of wall shear stress is significant for drag reduction and mechanism study of turbulence structure. MEMS wall shear stress sensor offers an accurate and effective method for wall shear stress measurement. Firstly, measurement principle and development status of thermal based MEMS wall shear stress sensor are introduced. Secondly, static and dynamic calibration methods of thermal based MEMS wall shear stress sensor are stressed. The static method can be based on velocity, flux and pressure measurement, while the commonly used dynamic calibration method is the Stokes-layer excitation method. Finally, conclusion and expectation are made about the calibration method.