波纹膜片对结构型高温压力传感器性能影响的研究

Corrugated Diaphragm of Structural Research on the Effects of High Temperature Pressure Transducer Performance

分析了一体化高温压力传感器中波纹膜片的结构参数对其性能的影响,详述了通过对带有圆弧形外波纹的波纹膜片的综合设计和工艺优化处理,研制出线性度好、灵敏度高的波纹膜片,使结构型高温传感器可工作在220℃环境,经试验测试结果表明:传感器的线性小于0.2% FS,迟滞小于0.2% FS,具有线性度好、灵敏度高和迟滞小的特点。

The corrugated diaphragm structure parameters affect the performance of the integration of high temperature pressure sensor is analyzed, by designing various conditions and optimizing technologic processes, good linear and sensitive corrugated diaphragm is produced, high temperature transducer works in temperature span 220?C, the experimental results show that Linear is less than 0.2% FS, hysteresis is less than 0.2% FS, has the characteristic of good linearity, good sensitivity and small hysteresis.