溶胶–凝胶法制备BZT-0.5BCT铁电薄膜及其电学性能研究

Sol-Gel Preparation of BZT-0.5BCT Ferroelectric Thin Films and Their Electrical Properties

(1-x)Ba(Ti0.8Zr0.2)O3-x(Ba0.7Ca0.3)TiO3 (BZT-xBCT)是一类新型的无铅铁电材料,表现出良好的铁电、压电性能,特别是x = 0.5时,BZT-0.5BCT处于准同型相界区域,具有优异的压电性能,而铁电性的研究还较少。本文采用溶胶–凝胶方法在Pt(111)基底上制备了BZT-0.5BCT铁电薄膜。研究了不同退火工艺对薄膜结构、形貌和铁电性的影响。结果表明逐层退火的薄膜表现出更好的铁电性。

(1-x)Ba(Ti0.8Zr0.2)O3-x(Ba0.7Ca0.3)TiO3 (BZT-xBCT) is a new lead-free ferroelectric materials, which has the best properties when the composition close to the morphotropic phase boundary. BZT- 0.5BCT has excellent piezoelectric property;however, the ferroelectric property is rarely studied. In this work, BZT-0.5BCT lead-free ferroelectric thin film has been synthesized on a Pt (111) substrate by sol-gel process. The structure, morphology and ferroelectric property are studied under different annealing process. The results indicated that BZT-0.5BCT ferroelectric thin film under layer-by-layer annealing process has better ferroelectric property than that annealed once.