强化统计分析算法应用:提升晶圆加工铸锭品质管控水平

Strengthen Statistical Analysis Algorithm Application: Elevating Wafer Manufacturing Ingot Quality Management Level

为有效提升晶圆制造企业的铸锭加工品质管控水平,在数理统计分析方法和信息技术的基础上,建立适用于晶圆制造企业的铸锭加工品质管控反馈控制解决方案,包括:自动化的晶圆铸锭数据采集、规范化的铸锭品质管控方法和铸锭良率预警反馈应用三个方面。通过上述方法的应用,有望将晶圆制造企业原有的抽样静态品质管控方法铸锭管理方法升级为自动化、标准化和实时反馈控制方法,从而从根本上提升晶圆制造企业铸锭加工品质管控水平。

In order to efficiently elevate the semiconductor manufacturing Ingot quality management level, a suggested method which based on the data statistical analysis method coupled with information technology was introduced. The suggested method including the automatic and periodic semi-conductor ingot data acquisition, standard semiconductor ingot management method and quality alarm feedback control method. By the application of this suggested method, it can be looking forward to transform the traditional statistic and sampling semiconductor manufacturing ingot quality management and control method into dynamic real-time feedback control method. Finally, it can be used for elevating the semiconductor manufacturing ingot quality management level.