直排四探针法测量硅片电阻率及不确定度评定

Measuring Resistivity of Silicon Wafers with Four-Point Probe Method and Evaluation of Uncertainty in Measurement

四探针电阻率测量仪广泛应用于半导体行业,是测量半导体材料电阻率的常用设备。本文针对不同样品测量时应注意的测量条件、适用的计算公式做了简要的说明,并对晶圆薄片的精密测量结果的不确定度评定做了比较详细的论述。

Resistivity measuring instruments with four-point probe is widely used in semiconductor industry, and it is a common device for measuring resistivity of semiconductor materials. In this paper, the measurement conditions and applicable calculation formulas for different samples are briefly de-scribed, and the uncertainty evaluation of the precise measurement results of wafer is discussed in detail.