重掺硅单晶中氧含量的测试

The Determination of Oxygen in High Doping Silicon Crystal

测定重掺硅单晶中的氧主要采用惰性气体熔融–红外光谱法,然而如何保证测试结果的准确性却是一个问题。本文讨论了惰性气体熔融–红外光谱法中拉制标准曲线的方法和建立测试的分析方法,通过该方法,可以获得重掺硅中准确的氧含量数据。

The oxygen in high doping silicon crystal is mainly determined by inert gas fusion-infrared ab-sorption method, but it is a problem that how get a result accurately. We discuss how to make standard curve and how to get test process to determine oxygen in high doping silicon crystal.