常压与热压烧结工艺对合金靶材结构与性能的影响

Effects of Atmospheric and Hot Pressing Sintering Processes on the Structure and Properties of Alloy Targets

全文综述了国内外常压与热压烧结靶材制备技术的进展,并分析总结靶材制备中烧结工艺对合金靶材制备及其性能的影响。分析了不同温度下开孔/闭孔率的变化,高温变形晶粒择优取向、温度与气氛变化对密度的影响,压力变化所引起的电阻变化机制,原子挥发/化合物分解/第二相析出与晶粒尺寸长大对气孔移动,电子传输截面变化及晶界散射效应的影响,湿化粉与气化粉烧结性能的变化,烧结热力学与动力学机理与技术瓶颈;展望了靶材制备发展方向。

This paper reviews the progress of atmospheric pressure and hot pressing sintering target preparation technology in China and abroad. It analyzed and summarized the influence of sintering process on the preparation and properties of alloy targets. The effects of opening/closing ratio at different temperatures, preferred orientation of deformed grains at high temperature, temperature and atmosphere on density were analyzed. The mechanism of resistance change caused by pressure change was also discussed. The effects of atomic volatilization/compound decomposition/second phase precipitation and grain size growth on pore movement, electron transport cross section change and grain boundary scattering effect are also analyzed. The changes of sintering properties of humidified powder and gasified powder, sintering thermodynamic and kinetic mechanism and technical bottleneck were summarized in this paper. And it also prospected the development direction of target preparation.