摘要
TiO2-like polymer films were synthesized by inductively coupled plasma in pulsed radio-frequency (RF) modes. The plasma chemistry, studied by optical emission spectroscopy, showed that the ra- dicals and fragments formed in the discharge were dependent on the precursor, and that the species density in the plasma gas is as a function of flux de gas that is used to carry the monomer into the plasma reactors.
TiO2-like polymer films were synthesized by inductively coupled plasma in pulsed radio-frequency (RF) modes. The plasma chemistry, studied by optical emission spectroscopy, showed that the ra- dicals and fragments formed in the discharge were dependent on the precursor, and that the species density in the plasma gas is as a function of flux de gas that is used to carry the monomer into the plasma reactors.
作者
Z. Li
X. Li
G. Liu
J.-J. Pireaux
L. Houssiau
N. Bonifaci
Z. Li;X. Li;G. Liu;J.-J. Pireaux;L. Houssiau;N. Bonifaci(Guizhou Institute of Technology, Guiyang, China;Research Centre in Physics of Matter and Radiation (PMR), University of Namur (FUNDP), Namur, Belgium;G2Elab, Université de Grenoble, CNRS, Grenoble, France)
