摘要
The paper is devoted to study of the electrical parameters of the motion parts of the MEMS such as solenoids. The analytical background is given in order to describe the influence of the electrical field components on the forces, which are result of interaction of the electromagnetic (EM) field components with the parts of motion devices of MEMS. The given analytical formulas open the ability to calculate the self-inductance of the microsolenoids of the different kind, as well as the stored energy of such motion devices, that could be used for the modeling and optimization of parameters of running devices of MEMS such as actuators, sensors etc.
The paper is devoted to study of the electrical parameters of the motion parts of the MEMS such as solenoids. The analytical background is given in order to describe the influence of the electrical field components on the forces, which are result of interaction of the electromagnetic (EM) field components with the parts of motion devices of MEMS. The given analytical formulas open the ability to calculate the self-inductance of the microsolenoids of the different kind, as well as the stored energy of such motion devices, that could be used for the modeling and optimization of parameters of running devices of MEMS such as actuators, sensors etc.
作者
Mykhaylo Andriychuk
Bohdan Karkulovskyi
Yarko Kuleshnyk
Mykhaylo Andriychuk;Bohdan Karkulovskyi;Yarko Kuleshnyk(Department of Computer Design System, Lviv Polytechnic National University, Lviv, Ukraine;Department of Numerical Methods of Mathematical Physics, Pidstryhach Institute for Applied Problems of Mechanics and Mathematics, NASU, Lviv, Ukraine)
