摘要
GaP terahertz (THz) two-dimensional (2D) photonic crystal (PC) waveguides with line defects were fabricated using inductively-coupled plasma reactive-ion etching (ICP-RIE) in Ar/Cl2 gas chemistries. THz-wave generation from the fabricated PC waveguides was demonstrated under collinear phase-matched difference-frequency generation (DFG), using Cr:Forsterite (Cr:F) lasers as the incident source. We compared the THz-wave output characteristics of the PC waveguides with that of GaP planar waveguides. The collinear phase-matching conditions in the DFG process were satisfied for 300- and 500-μm-wide PC waveguide structures at 0.7 and 0.6 THz, respectively. The additional output peaks that appeared near the edge of the photonic band gap, around 0.5 THz, were attributed to the guiding modes in the PC waveguide;no such peaks appeared in the non-patterned ridge waveguides. These experimental results suggest that the phonon-polariton confinement in THz-PC waveguides based on the GaP crystal could be used to enhance the nonlinear optical effect for THz-wave generation.
GaP terahertz (THz) two-dimensional (2D) photonic crystal (PC) waveguides with line defects were fabricated using inductively-coupled plasma reactive-ion etching (ICP-RIE) in Ar/Cl2 gas chemistries. THz-wave generation from the fabricated PC waveguides was demonstrated under collinear phase-matched difference-frequency generation (DFG), using Cr:Forsterite (Cr:F) lasers as the incident source. We compared the THz-wave output characteristics of the PC waveguides with that of GaP planar waveguides. The collinear phase-matching conditions in the DFG process were satisfied for 300- and 500-μm-wide PC waveguide structures at 0.7 and 0.6 THz, respectively. The additional output peaks that appeared near the edge of the photonic band gap, around 0.5 THz, were attributed to the guiding modes in the PC waveguide;no such peaks appeared in the non-patterned ridge waveguides. These experimental results suggest that the phonon-polariton confinement in THz-PC waveguides based on the GaP crystal could be used to enhance the nonlinear optical effect for THz-wave generation.
