摘要
<div style="text-align:justify;"> Due to the wave characteristics of light, diffraction occurs when the light passes through the optical system, so that the resolution of the ordinary far-field optical system is limited by the size of the Airy disk diameter. There are various factors that cause image quality degradation during system detection and imaging, such as optical system aberrations, atmospheric inter-ference, defocusing, system noise and so on. Super-resolution optical imaging technology is the most innovative breakthrough in the optical imaging and detection field in this century. It goes beyond the resolution limit of ordinary optical systems or detectors, and can get more details and information of the structure, providing unprecedented tools for various fields. Compared with ordinary optical systems, super-resolution systems have very high requirements on the signals to be detected, which cannot be met by ordinary detection techniques. Vacuum photoelectric detection and imaging technology is equipped with the characteristics of high sensitivity and fast response. It is widely used in super-resolution systems and has played a great role in super-resolution systems. In this paper, the principles and structure of the image-converter streak camera super-resolution system, scanning electron microscopy super-resolution system and laser scanning confocal super-resolution system will be sorted out separately, and the essential role of the vacuum photoelectric detection technology in the ultra-microscopic sys-tem will be analyzed. </div>
<div style="text-align:justify;"> Due to the wave characteristics of light, diffraction occurs when the light passes through the optical system, so that the resolution of the ordinary far-field optical system is limited by the size of the Airy disk diameter. There are various factors that cause image quality degradation during system detection and imaging, such as optical system aberrations, atmospheric inter-ference, defocusing, system noise and so on. Super-resolution optical imaging technology is the most innovative breakthrough in the optical imaging and detection field in this century. It goes beyond the resolution limit of ordinary optical systems or detectors, and can get more details and information of the structure, providing unprecedented tools for various fields. Compared with ordinary optical systems, super-resolution systems have very high requirements on the signals to be detected, which cannot be met by ordinary detection techniques. Vacuum photoelectric detection and imaging technology is equipped with the characteristics of high sensitivity and fast response. It is widely used in super-resolution systems and has played a great role in super-resolution systems. In this paper, the principles and structure of the image-converter streak camera super-resolution system, scanning electron microscopy super-resolution system and laser scanning confocal super-resolution system will be sorted out separately, and the essential role of the vacuum photoelectric detection technology in the ultra-microscopic sys-tem will be analyzed. </div>
