摘要
Cu-Zn ferrite nano thin films were deposited from a target of Cu-Zn ferrite onto a sapphire substrate using XeCl excimer laser operating 308 nm with an energy of 225 mJ and a frequency of 30 Hz. Films were deposited from the target onto sapphire (001) substrates heated to 650℃ in an oxygen atmosphere of 100 mTorr. The laser beam was incident On the target face at an angle of 45°. Studies on crystal structure were done by X-ray diffactometry (XRD). The surface texture, cross-section morphology and grain size was observed by JEOL-JSM-6400 scanning electron microscopy, atomic force microscopy (AFM) and magnetic force microscopy (MFM) [Model DI 3000, Digital instruments].
Cu-Zn ferrite nano thin films were deposited from a target of Cu-Zn ferrite onto a sapphire substrate using XeCl excimer laser operating 308 nm with an energy of 225 mJ and a frequency of 30 Hz. Films were deposited from the target onto sapphire (001) substrates heated to 650℃ in an oxygen atmosphere of 100 mTorr. The laser beam was incident On the target face at an angle of 45°. Studies on crystal structure were done by X-ray diffactometry (XRD). The surface texture, cross-section morphology and grain size was observed by JEOL-JSM-6400 scanning electron microscopy, atomic force microscopy (AFM) and magnetic force microscopy (MFM) [Model DI 3000, Digital instruments].
