摘要
A set of 2D steady state finite element numerical simulations of electromagnetic fields and heating distribution for an oxide Czochralski crystal growth system was carried out for different input current shapes (sine, square, triangle and sawtooth waveforms) of the induction coil. Comparison between the results presented here demonstrates the importance of input current shape on the electromagnetic field distribution, coil efficiency, and intensity and structure of generated power in the growth setup.
A set of 2D steady state finite element numerical simulations of electromagnetic fields and heating distribution for an oxide Czochralski crystal growth system was carried out for different input current shapes (sine, square, triangle and sawtooth waveforms) of the induction coil. Comparison between the results presented here demonstrates the importance of input current shape on the electromagnetic field distribution, coil efficiency, and intensity and structure of generated power in the growth setup.
