摘要
This study investigates controlled micro/nano manipulation of polydimethylsiloxane (PDMS) using Atomic Force Microscopy (AFM). Lithographic results revealed stick-slip phenomena along the slow scan direction. Varying the normal loading force, scan size, scan number and contact conditions allowed the control of certain lithographic outcomes e.g., channel spacing. The PDMS surface experienced significant in-plane deformation in response to the tip-induced lateral force. This displacement increased with increasing loading force, creating greater spacing between channels in the slow scan direction. Simultaneous generation of a lateral displacement in the fast scan direction caused a decrease in channel length with increasing loading force due to an increase in static friction with normal force, resulting in a greater surface relaxation, and shorter track length of dynamic friction. By controlling both the loading force and the number of scans over an area, frictional tiers were produced.
This study investigates controlled micro/nano manipulation of polydimethylsiloxane (PDMS) using Atomic Force Microscopy (AFM). Lithographic results revealed stick-slip phenomena along the slow scan direction. Varying the normal loading force, scan size, scan number and contact conditions allowed the control of certain lithographic outcomes e.g., channel spacing. The PDMS surface experienced significant in-plane deformation in response to the tip-induced lateral force. This displacement increased with increasing loading force, creating greater spacing between channels in the slow scan direction. Simultaneous generation of a lateral displacement in the fast scan direction caused a decrease in channel length with increasing loading force due to an increase in static friction with normal force, resulting in a greater surface relaxation, and shorter track length of dynamic friction. By controlling both the loading force and the number of scans over an area, frictional tiers were produced.
