单片集成三轴微机电陀螺仪

Monolithic Integrated Tri-axis MEMS Gyroscope

为使陀螺仪进一步小型化、集成化,提出了一种新型单片集成三轴微机电陀螺仪,该陀螺仪采用单一MEMS结构芯片实现3个轴向角速度的测量。介绍了单片三轴陀螺仪工作方式、结构设计以及电路原理,完成了MEMS结构的流片加工,对陀螺仪表头和整机进行了测试,单片三轴微机电陀螺仪x轴、y轴和z轴零偏稳定性分别达到53.4(°)/h、70.8(°)/h和18.4(°)/h,非线性度分别为1.59×10^(-4)、3.3×10^(-4)和2.18×10^(-4)。该陀螺仪具有三轴角速率检测效应,具有集成度高、体积小的优势,具有较强的应用潜力。

This article proposed a novel single-chip integrated tri-axis MEMS gyroscope,which was benefit for device miniature and integration.Only one chip MEMS structure was used to achieve tri-axis angular rate detection.Firstly,the operating principle,structure and electronic circuits of the gyroscope were introduced.Secondly,the fabrication process of silicon micro-structure was presented.Finally,the performances of gyroscope chip and the prototype were measured.The bias stabilities were 53.4(°)/h,70.8(°)/h and 18.4(°)/h in x-axis,y-axis and z-axis,respectively.The nonlinearities were 1.59×10-4,3.3×10-4 and 2.18×10-4 in x-axis,y-axis and z-axis,respectively.This gyroscope has tri-axis angular rate detection effect,with the advance of chip structure miniature,have certain application potentiality.