溶胶-凝胶法制备氧化锌薄膜的研究

Study on Preparation of Zinc Oxide Thin Films by Sol-Gel Method

采用溶胶-凝胶法在锌片和硅片表面制备氧化锌薄膜。采用XRD、SEM等分析测试手段对比了不同的配置比和衬底对氧化锌薄膜的相组成和显微形貌的影响。实验结果表明:与Si片相比,Zn片衬底对样品的衍射峰幅度产生一定的影响;所制备出来的样品都在衍射角2θ=34.4°附近出现衍射峰;当Zn2+浓度不同时,得到的Zn O薄膜的形貌不同。

The zinc oxide film was prepared on the surface of zinc sheet and the surface of silicon wafer by sol-gel method. The effects of different configuration ratio and substrate on the composition and microstructure of zinc oxide thin films were compared by XRD and SEM. The experimental results show that the Zn-based substrate has a certain effect on the diffraction peak amplitude of the samples compared with Si films. The prepared samples have diffraction peaks near the diffraction angle of 2θ=34.4°. When the Zn2+ concentration is different, the morphology of ZnO thin films is different.