准分子激光器中张氏面型电极的电场仿真研究

Simulation study on electric field of Chang electrodes in excimer lasers

为了获得准分子激光器高脉冲能量输出,采用张氏面型电极的理论,设计了一套能产生大面积均匀电场的紧凑型电极。通过ANSYS软件数值仿真获得了电极表面电场分布,并与紧凑型张氏面型电极的理论计算结果进行了对比验证;分析了紫外火花预电离结构对电极放电的影响,并进行了电位和电场分布仿真。结果表明,预电离板的存在直接影响了电极之间的电位和电场分布;电场仿真结果解释了预电离板的顶端与阳极形成放电的原因。该研究为大面积辉光放电电极设计提供了更深入的理论支持。

In order to obtain high pulsed energy output from an excimer laser, the Chang''s electrode theory was used to design a compact electrode for producing large area uniform electric field.Through numerical simulation of ANSYS software, the electric field distribution on the electrode surface was obtained and compared with the theoretical results of the compact Chang electrode.The effect of ultraviolet pre ionization structure on electrode discharging was analyzed.The potential and electric field distribution were simulated.The results show that the presence of preionization plate directly affects the potential and electric field distribution between electrodes.The simulation results of electric field can be used to explain the formation of discharging between the top of preionization plate and anode.The study provides deeper theoretical support for the design of large area glow discharge electrodes.