One of the major innovations awaiting in electron microscopy is full three-dimensional imaging at atomic resolution.Despite the success of aberration correction to deep sub-angstrom lateral resolution,spatial resoluti...One of the major innovations awaiting in electron microscopy is full three-dimensional imaging at atomic resolution.Despite the success of aberration correction to deep sub-angstrom lateral resolution,spatial resolution in depth is still far from atomic resolution.In scanning transmission electron microscopy(STEM),this poor depth resolution is due to the limitation of the illumination angle.To overcome this physical limitation,it is essential to implement a next-generation aberration corrector in STEM that can significantly improve the depth resolution.This review discusses the capability of depth sectioning for three-dimensional imaging combined with large-angle illumination STEM.Furthermore,the statistical analysis approach remarkably improves the depth resolution,making it possible to achieve three-dimensional atomic resolution imaging at oxide surfaces.We will also discuss the future prospects of three-dimensional imaging at atomic resolution by STEM depth sectioning.展开更多
High-angle annular dark field(HAADF)imaging in scanning transmission electron microscopy(STEM)has become an indispensable tool in materials science due to its ability to offer sub-°A resolution and provide chemic...High-angle annular dark field(HAADF)imaging in scanning transmission electron microscopy(STEM)has become an indispensable tool in materials science due to its ability to offer sub-°A resolution and provide chemical information through Z-contrast.This study leverages large language models(LLMs)to conduct a comprehensive bibliometric analysis of a large amount of HAADF-related literature(more than 41000 papers).By using LLMs,specifically ChatGPT,we were able to extract detailed information on applications,sample preparation methods,instruments used,and study conclusions.The findings highlight the capability of LLMs to provide a new perspective into HAADF imaging,underscoring its increasingly important role in materials science.Moreover,the rich information extracted from these publications can be harnessed to develop AI models that enhance the automation and intelligence of electron microscopes.展开更多
Recent advances in scanning transmission electron microscopy(STEM)have led to increased development of multidimensional STEM imaging modalities and novel image reconstruction methods.This interest arises because the m...Recent advances in scanning transmission electron microscopy(STEM)have led to increased development of multidimensional STEM imaging modalities and novel image reconstruction methods.This interest arises because the main electron lens in a modern transmission electron microscope usually has a diffraction-space information limit that is significantly better than the real-space resolution of the same lens.This state-of-affairs is sometimes shared by other scattering methods in modern physics and contributes to a broader excitement surrounding multidimensional techniques that scan a probe while recording diffraction-space images,such as ptychography and scanning nano-beam diffraction.However,the contrasting resolution in the two spaces raises the question as to what is limiting their effective performance.Here,we examine this paradox by considering the effects of aberrations in both image and diffraction planes,and likewise separate the contributions of pre-and post-sample aberrations.This consideration provides insight into aberration-measurement techniques and might also indicate improvements for super-resolution techniques.展开更多
扫描电镜具有分辨率高、信号稳定、操作简便等优点,可观察试样的微观形貌,在材料测试中起着重要的作用。扫描电镜主要由真空系统、电子光学系统、显示系统以及附属设备等组成。随着科技的不断发展,扫描电镜变得越来越普及,多数操作人员...扫描电镜具有分辨率高、信号稳定、操作简便等优点,可观察试样的微观形貌,在材料测试中起着重要的作用。扫描电镜主要由真空系统、电子光学系统、显示系统以及附属设备等组成。随着科技的不断发展,扫描电镜变得越来越普及,多数操作人员缺乏系统性的培训,操作水平参差不齐,对设备维护方面不够了解。以FEI Nova NanoSEM 450型场发射扫描电镜为例,介绍了该设备的一系列科学管理与规范操作方法,以期为相关操作人员提供参考。展开更多
体心立方(body⁃centered cubic,BCC)金属W作为微型化器件中重要的互连材料,其电迁移行为对小尺寸集成电路的稳定性至关重要。本文利用原位透射电子显微(transmission electron microscopy,TEM)技术,在原子尺度下研究了电迁移诱导BCC金属...体心立方(body⁃centered cubic,BCC)金属W作为微型化器件中重要的互连材料,其电迁移行为对小尺寸集成电路的稳定性至关重要。本文利用原位透射电子显微(transmission electron microscopy,TEM)技术,在原子尺度下研究了电迁移诱导BCC金属W表面结构动态演变过程。结果表明,自由表面是主要电迁移路径;而{110}面和<111>方向分别是优选的迁移面迁移方向;电迁移过程中W表面形成特定的原子台阶或锯齿状结构。对于非低能晶面{002},在电流作用下仍能发生定向迁移,形成新的台阶结构。研究结果揭示了电迁移过程中表面结构的演化规律,为优化BCC金属材料的微观结构设计、提高其在高电流密度环境下的结构性能稳定性提供借鉴。展开更多
基金Project supported by JST-PRESTO (Grant No.JPMJPR1871)JST-FOREST (Grant No.JPMJFR2033)+2 种基金JST-ERATO (Grant No.JPMJER2202)KAKENHI JSPS (Grant Nos.JP19H05788,JP21H01614,and JP24H00373)“Next Generation Electron Microscopy”social cooperation program at the University of Tokyo。
文摘One of the major innovations awaiting in electron microscopy is full three-dimensional imaging at atomic resolution.Despite the success of aberration correction to deep sub-angstrom lateral resolution,spatial resolution in depth is still far from atomic resolution.In scanning transmission electron microscopy(STEM),this poor depth resolution is due to the limitation of the illumination angle.To overcome this physical limitation,it is essential to implement a next-generation aberration corrector in STEM that can significantly improve the depth resolution.This review discusses the capability of depth sectioning for three-dimensional imaging combined with large-angle illumination STEM.Furthermore,the statistical analysis approach remarkably improves the depth resolution,making it possible to achieve three-dimensional atomic resolution imaging at oxide surfaces.We will also discuss the future prospects of three-dimensional imaging at atomic resolution by STEM depth sectioning.
基金National Research Foundation(NRF)Singapore,under its NRF Fellowship(Grant No.NRFNRFF11-2019-0002).
文摘High-angle annular dark field(HAADF)imaging in scanning transmission electron microscopy(STEM)has become an indispensable tool in materials science due to its ability to offer sub-°A resolution and provide chemical information through Z-contrast.This study leverages large language models(LLMs)to conduct a comprehensive bibliometric analysis of a large amount of HAADF-related literature(more than 41000 papers).By using LLMs,specifically ChatGPT,we were able to extract detailed information on applications,sample preparation methods,instruments used,and study conclusions.The findings highlight the capability of LLMs to provide a new perspective into HAADF imaging,underscoring its increasingly important role in materials science.Moreover,the rich information extracted from these publications can be harnessed to develop AI models that enhance the automation and intelligence of electron microscopes.
基金the U.S.Department of Energy,Office of Basic Energy Sciences(DOE-BES),Division of Materials Sciences and Engineering under contract ERKCS89.We acknowledge support for 4D-STEM performed as part of user proposal at the Center for Nanophase Materials Sciences(CNMS),which is a US Department of Energy,Office of Science,User Facility.Microscopy performed using instrumentation within ORNL’s Materials Characterization Core provided by UTBattelle,LLC,under Contract No.DE-AC05-00OR22725 with the DOE and sponsored by the Laboratory Directed Research and Development Program of Oak Ridge National Laboratory,managed by UT-Battelle,LLC,for the U.S.Department of Energy.
文摘Recent advances in scanning transmission electron microscopy(STEM)have led to increased development of multidimensional STEM imaging modalities and novel image reconstruction methods.This interest arises because the main electron lens in a modern transmission electron microscope usually has a diffraction-space information limit that is significantly better than the real-space resolution of the same lens.This state-of-affairs is sometimes shared by other scattering methods in modern physics and contributes to a broader excitement surrounding multidimensional techniques that scan a probe while recording diffraction-space images,such as ptychography and scanning nano-beam diffraction.However,the contrasting resolution in the two spaces raises the question as to what is limiting their effective performance.Here,we examine this paradox by considering the effects of aberrations in both image and diffraction planes,and likewise separate the contributions of pre-and post-sample aberrations.This consideration provides insight into aberration-measurement techniques and might also indicate improvements for super-resolution techniques.
文摘扫描电镜具有分辨率高、信号稳定、操作简便等优点,可观察试样的微观形貌,在材料测试中起着重要的作用。扫描电镜主要由真空系统、电子光学系统、显示系统以及附属设备等组成。随着科技的不断发展,扫描电镜变得越来越普及,多数操作人员缺乏系统性的培训,操作水平参差不齐,对设备维护方面不够了解。以FEI Nova NanoSEM 450型场发射扫描电镜为例,介绍了该设备的一系列科学管理与规范操作方法,以期为相关操作人员提供参考。
文摘体心立方(body⁃centered cubic,BCC)金属W作为微型化器件中重要的互连材料,其电迁移行为对小尺寸集成电路的稳定性至关重要。本文利用原位透射电子显微(transmission electron microscopy,TEM)技术,在原子尺度下研究了电迁移诱导BCC金属W表面结构动态演变过程。结果表明,自由表面是主要电迁移路径;而{110}面和<111>方向分别是优选的迁移面迁移方向;电迁移过程中W表面形成特定的原子台阶或锯齿状结构。对于非低能晶面{002},在电流作用下仍能发生定向迁移,形成新的台阶结构。研究结果揭示了电迁移过程中表面结构的演化规律,为优化BCC金属材料的微观结构设计、提高其在高电流密度环境下的结构性能稳定性提供借鉴。
