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Harmonics in the Squirrel Cage Induction Motor Analytic Calculation Part III: Influence on the Torque-speed Characteristic 被引量:1
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作者 G.Kovács 《CES Transactions on Electrical Machines and Systems》 EI CSCD 2024年第1期86-102,共17页
The harmonics that appear in the squirrel cage asynchronous machine have been discussed in great detail in the literature for a long time. However, the systematization of the phenomenon is still pending, so we made an... The harmonics that appear in the squirrel cage asynchronous machine have been discussed in great detail in the literature for a long time. However, the systematization of the phenomenon is still pending, so we made an attempt to fill this gap in the previous parts of our study by elaborating formulas for calculation of parasitic torques. It was a general demand among those who work in this field towards the author to verify his formulas with measurements. In the literature, it seems,only one detailed, purposeful series of measurements has been published so far, the purpose of which was to investigate the effect of the number of rotor slots on the torque-speed characteristic curve of the machine. The main goal of this study is to verify the correctness of the formulas by comparing them with the referred series of measurements. Relying on this, the expected synchronous parasitic torques were developed for the frequently used rotor slot numbers-as a design guide for the engineer.Thus, together with our complete table for radial magnetic pull published in our previous work, the designer has all the principles, data and formulas available for the right number of rotor slots for his given machine and for the drive system. This brings this series of papers to an end. 展开更多
关键词 Asynchronous parasitic torques Induction motor Squirrel cage rotor Space harmonics Synchronous parasitic torques
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Interference of harmonics emitted by different tunneling momentum channels in laser fields
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作者 Ling-Yu Zhang Zhuo-Xuan Xie +2 位作者 Can Wang Xin-Lei Ge Jing Guo 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第9期366-372,共7页
By numerically solving the semiconductor Bloch equation(SBEs),we theoretically study the high-harmonic generation of ZnO crystals driven by one-color and two-color intense laser pulses.The results show the enhancement... By numerically solving the semiconductor Bloch equation(SBEs),we theoretically study the high-harmonic generation of ZnO crystals driven by one-color and two-color intense laser pulses.The results show the enhancement of harmonics and the cut-off remains the same in the two-color field,which can be explained by the recollision trajectories and electron excitation from multi-channels.Based on the quantum path analysis,we investigate contribution of different ranges of the crystal momentum k of ZnO to the harmonic yield,and find that in two-color laser fields,the intensity of the harmonic yield of different ranges from the crystal momentum makes a big difference and the harmonic intensity is depressed from all k channels,which is related to the interferences between harmonics from symmetric k channels. 展开更多
关键词 high-order harmonic generation the semiconductor Bloch equation k-resolvedinter-bandhar-monic spectrum four-step semiclassical model
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Load Static Models for Conservation Voltage Reduction in the Presence of Harmonics
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作者 William Douglas Caetano Patrícia Romeiro da Silva Jota 《Energy and Power Engineering》 2016年第2期62-75,共14页
The Conservation Voltage Reduction (CVR) is a technique that aims to achieve the decrease of power consumption as a result of voltage reduction. The customer is supplied with the lowest possible voltage level compatib... The Conservation Voltage Reduction (CVR) is a technique that aims to achieve the decrease of power consumption as a result of voltage reduction. The customer is supplied with the lowest possible voltage level compatible with the stipulated level by the regulatory agency. International Standards ANSI C84.1-2006 and IEEE std 1250-1995 specify the range of supply voltage to electronics equipment from 0.9 to 1.05 pu of nominal voltage. To analyse the CVR effect in distribution systems with different load characteristics (residential, commercial, industrial or a combination of these), mathematical load models are used. Typically, these equipment/load models are used to analyse load aggregation without any consideration of its nonlinearity characteristics. Aiming to analyse the nonlinear characteristics and its consequences, this paper presents a discussion of the neglected variables as well as the results of a set of measurements of nonlinear loads. Different mathematical models are applied to obtain them for each load. Using these models the load aggregation is evaluated. It is presented that although the models show adequate results for individual loads, the same does not occur for aggregated models if the harmonic contribution is not considered. Consequently, to apply the load model in CVR it is necessary to consider the harmonics presence and the model has to be done using only the fundamental frequency data. The discussion about the causes is done and the models are compared with the measurements. 展开更多
关键词 CVR Load Model in the Presence of harmonics Conservation Voltage Reduction Load Model Aggregation in the Presence of harmonics
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Distorted Waveform Balancing Using an Artificial Bee Colony (ABC) Based Optimal Control for Mitigating Total Harmonics in Single Phase Inverter
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作者 N. M. Spencer Prathap Singh Kesavan Nair T. Ajith Bosco Raj 《Circuits and Systems》 2016年第9期2154-2167,共14页
The main objective of this paper is to reduce the total harmonics in a single phase voltage source inverter using Artificial Bee Colony (ABC) optimization technique for critical load applications. Single phase inverte... The main objective of this paper is to reduce the total harmonics in a single phase voltage source inverter using Artificial Bee Colony (ABC) optimization technique for critical load applications. Single phase inverter is a non-linear load using power electronic components causing distortions in the load voltage and current wave patterns from the sinusoidal waveforms due to harmonics. The mapping state space model for a full bridge voltage source inverter was developed using output load resistance. An optimal ABC technique has been designed and optimized values are estimated using a full bridge voltage controlled inverter using Proportional Integral Algorithm. The MATLAB/SIMULINK tool and Experimental setup were implemented and their THD values were estimated. Also this ABC scheme is compared with the previous results such as PI Algorithm, Fuzzy logic controller and Neuro-fuzzy controllers. From the simulation and experimental results using ABC algorithm, it is observed that the total harmonics are mitigated considerably compared to previous results with respect to the power quality standards such as IEEE-519 and IEC 61000. 展开更多
关键词 Voltage Source Inverter THD Proportional Integral Controller Artificial Bee Colony Voltage harmonics Current harmonics
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Electromagnetic Zero-Sequence Harmonics Blocker: Modeling and Experimental Analysis
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作者 Luis C. Origa de Oliveira Rodrigo N. de Oliveira +1 位作者 Julio B. de Souza Stefani C. L. de Freitas 《Journal of Energy and Power Engineering》 2014年第8期1425-1431,共7页
This paper reveals new contributions to the analysis and development of devices for harmonic distortion mitigation. Considering the sequential distribution of harmonic currents, zero-sequence components could be dimin... This paper reveals new contributions to the analysis and development of devices for harmonic distortion mitigation. Considering the sequential distribution of harmonic currents, zero-sequence components could be diminished using electromagnetic devices, particularly the eZSB (electromagnetic zero-sequence blocking). One important characteristic of this device, which has received particular attention on this research, is its robustness and low cost of construction. Theoretical and experimental results related to the behavior of the electromagnetic blocking devices are presented. The results illustrate the consistence of the theoretical aspects related with the model in the frequency domain, as well as the performance of the blocking devices, reducing zero-sequence harmonic currents, mainly by the conjunct action of the eZSF (electromagnetic zero-sequence harmonic filter), working as a impedance coupler. In this context, aiming the evaluation of the reliability of the results obtained through mathematical modeling, experimental tests have been carried out using a low-power prototype, highlighting particular aspects related to its function as a zero-sequence harmonic blocker. 展开更多
关键词 Electromagnetic blocker zero-sequence harmonics triplens harmonics power quality
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Maximizing the endosonography: The role of contrast harmonics, elastography and confocal endomicroscopy 被引量:7
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作者 Andrada Seicean Ofelia Mosteanu Radu Seicean 《World Journal of Gastroenterology》 SCIE CAS 2017年第1期25-41,共17页
New technologies in endoscopic ultrasound(EUS) evaluation have been developed because of the need to improve the EUS and EUS-fine needle aspiration(EUS- FNA) diagnostic rate. This paper reviews the principle, indicati... New technologies in endoscopic ultrasound(EUS) evaluation have been developed because of the need to improve the EUS and EUS-fine needle aspiration(EUS- FNA) diagnostic rate. This paper reviews the principle, indications, main literature results, limitations and future expectations for each of the methods presented. Contrast-enhanced harmonic EUS uses a low mechanical index and highlights slowflow vascularization. This technique is useful for differentiating solid and cystic pancreatic lesions and assessing biliary neoplasms, submucosal neoplasms and lymph nodes. It is also useful for the discrimination of pancreatic masses based on their qualitative patterns; however, the quantitative assessment needs to be improved. The detection of small solid lesions is better, and the EUS-FNA guidance needs further research. The differentiation of cystic lesions of the pancreas and the identification of the associated malignancy features represent the main indications. Elastography is used to assess tissue hardness based on the measurement of elasticity. Despite its low negative predictive value, elastography might rule out the diagnosis of malignancy for pancreatic masses. Needle confocal laser endomicroscopy offers useful information about cystic lesions of the pancreas and is still under evaluation for use with solid pancreatic lesions of lymph nodes. 展开更多
关键词 ENDOSONOGRAPHY Endosonography-fine needle aspiration CONTRAST-ENHANCED harmonics ELASTOGRAPHY ENDOMICROSCOPY Pancreas Lymph nodes Cyst
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Wavelet analysis method of harmonics and electromagnetic interference in coal mines 被引量:5
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作者 ZHANG Fan LI Ming 《Mining Science and Technology》 EI CAS 2010年第4期576-580,共5页
In this study we propose an analytical method based on orthogonal wavelet transforms for detecting harmonic noise and Electromagnetic Interference (EMI) from power supply systems and equipment in coal mines. The metho... In this study we propose an analytical method based on orthogonal wavelet transforms for detecting harmonic noise and Electromagnetic Interference (EMI) from power supply systems and equipment in coal mines. The method will separate interference from signals through wavelet packet decomposition and then accomplish wavelet packet synthesis towards decomposition results after filtering, to remove harmonic noise and electromagnetic interference. Detailed simulation experiments are presented to study power harmonics and Electrical Fast Transient Burst (EFT/B) interference and to validate the effectiveness of our proposed method. The experimental results show that the proposed method, suitable for mutant and non-stationary signal detection, can accurately analyze harmonic interference and EMI in coal mines, as well as establish EMI source models and perform underground Electromagnetic Compatibility (EMC) prediction analyses. 展开更多
关键词 coal mine harmonics interference EMI EMC wavelet analysis
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A Precise Algorithm for Non-Integer Harmonics Analysis Based on FFT and Neural Network 被引量:4
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作者 WANGGong-bao MAWei-ming +1 位作者 XIANGDong-yang ZHANGwen-bo 《Wuhan University Journal of Natural Sciences》 CAS 2004年第4期454-458,共5页
By means of an arificial neural network (ANN) model, higher measurement accuracy of integer harmonics can be obtained. Combining the windowed fast Fourier transform (FFT) algorithm with the improved ANN model, we pres... By means of an arificial neural network (ANN) model, higher measurement accuracy of integer harmonics can be obtained. Combining the windowed fast Fourier transform (FFT) algorithm with the improved ANN model, we present a new precise algorithm for non-integer harmonics analysis. According to the result obtained from the Hanning-windowed FFT algorithm, we choose the initial values of orders of harmonics for the neural network. Through such processing, the time of iterations is shortened and the convergence rate of neural network is raised thereby. The simulation results show that close non-integer harmonics can be separated from a signal with higher accuracy and better real-time by using the algorithm presented in the paper. Key words fast Fourier transform (FFT) - artificial neural network (ANN) - Hanning-window - harmonics analysis CLC number TM 935 Foundation item: Supported by the Teaching and Research Award Program for Outstanding Young Teachers in Higher Education Institutions of China (2001-182) and the Science Foundation of Naval University of Engineering(HGDJJ03001).Biography: WANG Gong-bao (1962-), male, Professor, research direction: artificial neural network, wavelet analysis and their applications to signal processing in electric power systems. 展开更多
关键词 fast Fourier transform (FFT) artificial neural network (ANN) Hanning-window harmonics analysis
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Probing the structure of multi-center molecules with odd–even high harmonics 被引量:4
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作者 Ning Su Shujuan Yu +2 位作者 Weiyan Li Shiping Yang Yanjun Chen 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第5期274-280,共7页
We study high-order harmonic generation(HHG)from multi-center asymmetric linear molecules numerically and analytically.Our simulations show that odd and even HHG spectra of the asymmetric multi-center system respond d... We study high-order harmonic generation(HHG)from multi-center asymmetric linear molecules numerically and analytically.Our simulations show that odd and even HHG spectra of the asymmetric multi-center system respond differently to the change of the molecular structure.Specifically,when the internuclear distances between these nuclei of the molecule have a small change,the odd spectra usually do not change basically,but the even spectra differ remarkably.Based on this phenomenon,a simple procedure is proposed to probe the positions of these nuclei with odd–even HHG.Our results shed light on attosecond probing of the structure of multi-center molecules using HHG. 展开更多
关键词 odd-even harmonics multi-center asymmetric molecules molecular structure
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Adaptive hp finite element method for fluorescence molecular tomography with simplified spherical harmonics approximation 被引量:4
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作者 Hongbo Guo Yuqing Hou +3 位作者 Xiaowei He Jingjing Yu Jingxing Cheng Xin Pu 《Journal of Innovative Optical Health Sciences》 SCIE EI CAS 2014年第2期70-81,共12页
Recently,the simplified spherical harmonics equations(SP)model has at tracted much att entionin modeling the light propagation in small tissue ggeometriesat visible and near-infrared wave-leng ths.In this paper,we rep... Recently,the simplified spherical harmonics equations(SP)model has at tracted much att entionin modeling the light propagation in small tissue ggeometriesat visible and near-infrared wave-leng ths.In this paper,we report an eficient numerical method for fluorescence moleeular tom-ography(FMT)that combines the advantage of SP model and adaptive hp finite elementmethod(hp-FEM).For purposes of comparison,hp-FEM and h-FEM are,respectively applied tothe reconstruction pro cess with diffusion approximation and SPs model.Simulation experiments on a 3D digital mouse atlas and physical experiments on a phantom are designed to evaluate thereconstruction methods in terms of the location and the reconstructed fluorescent yield.Theexperimental results demonstrate that hp-FEM with SPy model,yield more accurate results thanh-FEM with difusion approximation model does.The phantom experiments show the potentialand feasibility of the proposed approach in FMT applications. 展开更多
关键词 Fluorescence molecular tomog maphy simplified spherical harmonics equations reconstruction adaptive finite element method.
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High-order optical vortex harmonics generated by relativistic femtosecond laser pulse 被引量:3
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作者 韩玉晶 廖国前 +3 位作者 陈黎明 李玉同 王伟民 张杰 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第6期403-405,共3页
Harmonics generated by an intense femtosecond Gaussian laser pulse normally incident on a spiral-shaped thin foil target were studied. By using two-dimensional (2D) particle-in-cell (PIC) simulation, we observed e... Harmonics generated by an intense femtosecond Gaussian laser pulse normally incident on a spiral-shaped thin foil target were studied. By using two-dimensional (2D) particle-in-cell (PIC) simulation, we observed evident odd harmonics signals in the reflection direction and found that the reflected field has a helical structure determined by the target shape. This method provides a new way to generate an intense ultraviolet vortex with high-order topological charge by use of ultrahigh intense laser-driven harmonics. 展开更多
关键词 optical vortex laser plasma harmonics
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Phase Relation of Harmonics in Nonlinear Focused Ultrasound 被引量:2
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作者 彭哲凡 林伟军 +3 位作者 刘石磊 苏畅 张海澜 王秀明 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第8期54-58,共5页
The phase relation of harmonics in high-intensity focused ultrasound is investigated numerically and experimen- tally. The nonlinear Westervelt equation is solved to model nonlinear focused sound field by using the fi... The phase relation of harmonics in high-intensity focused ultrasound is investigated numerically and experimen- tally. The nonlinear Westervelt equation is solved to model nonlinear focused sound field by using the finite difference time domain method. Experimental waveforms are measured by a robust needle hydrophone. Then the relative phase quantity is introduced and obtained by using the zero-phase filter. The results show that the nth harmonic relative phase quantity is approximately (n - 1) π/3 at geometric center and increases along the axial direction. Moreover, the relative phase quantity decreases with the increase of source amplitude. This phase relation gives an explanation of some nonlinear phenomena such as the discrepancy of positive and negative pressure. 展开更多
关键词 of on AS Phase Relation of harmonics in Nonlinear Focused Ultrasound IS in
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Harmonics in the Squirrel Cage Induction Motor Analytic Calculation-Part Ⅰ: Differential Leakage, Attenuation, Asynchronous Parasitic Torques 被引量:3
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作者 G.Kovács 《CES Transactions on Electrical Machines and Systems》 CSCD 2023年第3期320-329,共10页
The magnetic field generated in the air gap of the cage asynchronous machine and the harmonics of the magnetomotive forces creating that magnetic field, as well as the related differential leakage, attenuation, asynch... The magnetic field generated in the air gap of the cage asynchronous machine and the harmonics of the magnetomotive forces creating that magnetic field, as well as the related differential leakage, attenuation, asynchronous parasitic torques have been discussed in great detail in the literature, but always separately, for a long time. However, systematization of the phenomenon still awaits. Therefore, it is worth summarizing the completeness of the phenomena in a single study – with a new approach at the same time-in order to reveal the relationships between them. The role of rotor slot number is emphasized much more than before. An existing, commonly used, but still impractical basic figure has been modified to more clearly demonstrate the response of the rotor for the harmonics of the stator. The need to treat differential leakage, asynchronous parasitic torques and attenuation together will be demonstrated: new formula for asynchronous parasitic torque is derived;the long-used characteristic curves for differential leakage and attenuation used separately so far was merged into one, correct curve in order to provide a correct design guide for the engineers. 展开更多
关键词 Asynchronous parasitic torque ATTENUATION Differential leakage Squirrel cage induction motor Winding harmonics
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Quantitative Measurement of the Proportions of High-Order Harmonics for the 4B7B Soft-X-Ray Source at Beijing Synchrotron Radiation Facility 被引量:2
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作者 朱托 尚万里 +9 位作者 张文海 杨家敏 熊刚 赵阳 况龙钰 赵屹东 郑雷 崔明启 唐坤马 陈燕 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第12期1194-1196,共3页
A transmission grating coupled with an X-ray charge coupled device (CCD) is used to quantitatively measure the proportion of high-order harmonics of the soft-X-ray source of beam line 4B7B. The results show that the... A transmission grating coupled with an X-ray charge coupled device (CCD) is used to quantitatively measure the proportion of high-order harmonics of the soft-X-ray source of beam line 4B7B. The results show that the monochromatic X-ray has third-order and second-order harmonics. The proportion of second-order harmonic of 4B7B is less than 9.0% and the third- order harmonic is below 0.7% when no suppressing method is applied. When suppression methods are used, the proportion of second-order harmonic is less than 1.7% and the third-order harmonic is ignorable. 展开更多
关键词 quantitative measurement high-order harmonics suppressing method
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Higher Harmonics Induced by Waves Propagating over A Submerged Obstacle in the Presence of Uniform Current 被引量:5
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作者 宁德志 林红星 +1 位作者 滕斌 邹青萍 《China Ocean Engineering》 SCIE EI CSCD 2014年第6期725-738,共14页
To investigate higher harmonics induced by a submerged obstacle in the presence of uniform current, a 2D fully nonlinear numerical wave flume(NWF) is developed by use of a time-domain higher-order boundary element m... To investigate higher harmonics induced by a submerged obstacle in the presence of uniform current, a 2D fully nonlinear numerical wave flume(NWF) is developed by use of a time-domain higher-order boundary element method(HOBEM) based on potential flow theory. A four-point method is developed to decompose higher bound and free harmonic waves propagating upstream and downstream around the obstacle. The model predictions are in good agreement with the experimental data for free harmonics induced by a submerged horizontal cylinder in the absence of currents. This serves as a benchmark to reveal the current effects on higher harmonic waves. The peak value of non-dimensional second free harmonic amplitude is shifted upstream for the opposing current relative to that for zero current with the variation of current-free incident wave amplitude, and it is vice versa for the following current. The second-order analysis shows a resonant behavior which is related to the ratio of the cylinder diameter to the second bound mode wavelength over the cylinder. The second-order resonant position slightly downshifted for the opposing current and upshifted for the following current. 展开更多
关键词 higher harmonics wave-current interaction HOBEM free mode
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Higher Harmonics in Free Electron Laser with a Two-Wavenumber Plane Wiggler Magnetic Field 被引量:1
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作者 LU Bo YANG Zhonghai +1 位作者 LIU Shenggang YU Junsheng 《Chinese Physics Letters》 SCIE CAS CSCD 1993年第4期223-226,共4页
The higher harmonics of the free electron laser(FEL)with a two-wavenumber plane wiggler magnetic field,which may induce a lot of higher harmonics,are investigated.Using a two-wavenumber wiggler comprised of two separa... The higher harmonics of the free electron laser(FEL)with a two-wavenumber plane wiggler magnetic field,which may induce a lot of higher harmonics,are investigated.Using a two-wavenumber wiggler comprised of two separate periodicities,k_(ω)and k_(ω)+Δk,numerical simulations show that the higher harmonic may be amplified and the first harmonic may be suppressed in this kind of FEL with an optimized parameterΔk.The coupling coefficient and gain coefficient in low-gain regime of the harmonic are also obtained. 展开更多
关键词 HARMONIC harmonics number
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Surface Tension Effect on Harmonics of Rayleigh-Taylor Instability
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作者 刘万海 王翔 马文芳 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2018年第1期39-44,I0001,共7页
Using the method of the parameter expansion up to the third order, explicitly investigates surface tension effect on harmonics at weakly nonlinear stage in Rayleigh-Taylor instability (RTI) for arbitrary Atwood numb... Using the method of the parameter expansion up to the third order, explicitly investigates surface tension effect on harmonics at weakly nonlinear stage in Rayleigh-Taylor instability (RTI) for arbitrary Atwood numbers and compares the results with those of classical RTI within the framework of the third-order weakly nonlinear theory. It is found that surface tension strongly reduces the linear growth rate of time, resulting in mild growth of the amplitude of the fundamental mode, and changes amplitudes of the second and third har- monics, as is expressed as a tension factor coupling in amplitudes of the harmonics. On the one hand, surface tension can either decrease or increase the space amplitude; on the other hand, surface tension can also change their phases for some conditions which are explicitly determined. 展开更多
关键词 Rayleigh-Taylor instability Surface tension harmonics Weakly nonlinearity
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Performance evaluation of the simpli¯ed spherical harmonics approximation for cone-beam X-ray luminescence computed tomography imaging 被引量:1
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作者 Haibo Zhang Guohua Geng +6 位作者 Yanrong Chen Fengjun Zhao Yuqing Hou Huangjian Yi Shunli Zhang Jingjing Yu Xiaowei He 《Journal of Innovative Optical Health Sciences》 SCIE EI CAS 2017年第3期97-106,共10页
As an emerging molecular imaging modality,cone-beam X-ray luminescence computed tomog-raphy(CB-XLCT)uses X-ray-excitable probes to produce near-infrared(NIR)luminescence and then reconst ructs three-dimensional(3D)dis... As an emerging molecular imaging modality,cone-beam X-ray luminescence computed tomog-raphy(CB-XLCT)uses X-ray-excitable probes to produce near-infrared(NIR)luminescence and then reconst ructs three-dimensional(3D)distribution of the probes from surface measurements.A proper photon-transportation model is critical to accuracy of XLCT.Here,we presented a systematic comparison between the common-used Monte Carlo model and simplified spherical harmonics(SPN).The performance of the two methods was evaluated over several main spec-trums using a known XLCT material.We designed both a global measurement based on the cosine similarity and a locally-averaged relative error,to quantitatively assess these methods.The results show that the SP_(3) could reach a good balance between the modeling accuracy and computational efficiency for all of the tested emission spectrums.Besides,the SP_(1)(which is equivalent to the difusion equation(DE))can be a reasonable alternative model for emission wavelength over 692nm.In vivo experiment further demonstrates the reconstruction perfor-mance of the SP:and DE.This study would provide a valuable guidance for modeling the photon-transportation in CB-XLCT. 展开更多
关键词 Cone-beam X-ray luminescence computed tomography photon-transportation model .simplified spherical harmonics approximation diffusion equations.
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Theory of higher harmonics imaging in tapping-mode atomic force microscopy 被引量:1
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作者 李渊 钱建强 李英姿 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第5期213-218,共6页
The periodic impact force induced by tip-sample contact in a tapping mode atomic force microscope (AFM) gives rise to the non-harmonic response of a micro-cantilever. These non-harmonic signals contain the full char... The periodic impact force induced by tip-sample contact in a tapping mode atomic force microscope (AFM) gives rise to the non-harmonic response of a micro-cantilever. These non-harmonic signals contain the full characteristics of tip-sample interaction. A complete theoretical model describing the dynamical behaviour of tip-sample system was developed in this paper. An analytic formula was introduced to describe the relationship between time-varying tip-sample impact force and tip motion. The theoretical analysis and numerical results both show that the timevarying tip-sample impact force can be reconstructed by recording tip motion. This allows for the reconstruction of the characteristics of the tip-sample force, like contact time and maximum contact force. It can also explain the ability of AFM higher harmonics imaging in mapping stiffness and surface energy variations. 展开更多
关键词 tapping mode atomic force microscopy higher harmonics imaging
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At wavelength coherent scatterometry microscope using high-order harmonics for EUV mask inspection 被引量:3
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作者 Yutaka Nagata Tetsuo Harada +2 位作者 Takeo Watanabe Hiroo Kinoshita Katsumi Midorikawa 《International Journal of Extreme Manufacturing》 2019年第3期1-12,共12页
In this review,we describe our research on the development of the 13.5 nm coherent microscope using high-order harmonics for the mask inspection of extreme ultraviolet(EUV)lithography.EUV lithography is a game-changin... In this review,we describe our research on the development of the 13.5 nm coherent microscope using high-order harmonics for the mask inspection of extreme ultraviolet(EUV)lithography.EUV lithography is a game-changing piece of technology for high-volume manufacturing of commercial semiconductors.Many top manufacturers apply EUV technology for fabricating the most critical layers of 7 nm chips.Fabrication and inspection of defect-free masks,however,still remain critical issues in EUV technology.Thus,in our pursuit for a resolution,we have developed the coherent EUV scatterometry microscope(CSM)system with a synchrotron radiation(SR)source to establish the actinic metrology,along with inspection algorithms.The intensity and phase images of patterned EUV masks were reconstructed from diffraction patterns using ptychography algorithms.To expedite the practical application of the CSM,we have also developed a standalone CSM,based on high-order harmonic generation,as an alternative to the SR-CSM.Since the application of a coherent 13.5 nm harmonic enabled the production of a high contrast diffraction pattern,diffraction patterns of sub-100 ns size defects in a 2D periodic pattern mask could be observed.Reconstruction of intensity and phase images from diffraction patterns were also performed for a periodic line-and-space structure,an aperiodic angle edge structure,as well as a cross pattern in an EUV mask. 展开更多
关键词 high-order harmonics coherent EUV light EUV lithography coherent EUV scatterometry microscope synchrotron radiation EUV mask inspection
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