In this work,we investigated the discharge characteristics and heating mechanisms of argon helicon plasma in different wave coupled modes with and without blue core.Spatially resolved spectroscopy and emission intensi...In this work,we investigated the discharge characteristics and heating mechanisms of argon helicon plasma in different wave coupled modes with and without blue core.Spatially resolved spectroscopy and emission intensity of argon atom and ion lines were measured via local optical emission spectroscopy,and electron density was measured experimentally by an RFcompensated Langmuir probe.The relation between the emission intensity and the electron density was obtained and the wavenumbers of helicon and’Trivelpiece-Gould’(TG)waves were calculated by solving the dispersion relation in wave modes.The results show that at least two distinct wave coupled modes appear in argon helicon plasma at increasing RF power,i.e.blue core(or BC)mode with a significant bright core of blue lights and a normal wave(NW)mode without blue core.The emission intensity of atom line 750.5 nm(lArⅠ750.5nm)is related to the electron density and tends to be saturated in wave coupled modes due to the neutral depletion,while the intensity of ion line 480.6 nm(IArⅡ480.6nm)is a function of the electron density and temperature,and increases dramatically as the RF power is increased.Theoretical analysis shows that TG waves are strongly damped at the plasma edge in NW and/or BC modes,while helicon waves are the dominant mechanism of power deposition or central heating of electrons in both modes.The formation of BC column mainly depends on the enhanced central electron heating by helicon waves rather than TG waves since the excitation of TG waves would be suppressed in this special anti-resonance region.展开更多
We present here a kind of low-frequency oscillation in argon helicon discharge with a half helical antenna.This time-dependent instability shows a global quasi-periodic oscillation of plasma density and electron tempe...We present here a kind of low-frequency oscillation in argon helicon discharge with a half helical antenna.This time-dependent instability shows a global quasi-periodic oscillation of plasma density and electron temperature,with a typical frequency of a few tens of Hz which increases with external magnetic field as well as radiofrequency(RF)power.The relative oscillation amplitude decreases with magnetic field and RF power,but the rising time and pulse width do not change significantly under different discharge conditions.The oscillation can only be observed in some specific conditions of low magnetic fields and low RF power when the gas flows in from one end of the discharge area and out from another end.This global instability is suggested to be attributed to the pressure instability of neutral depletion,which is the result of compound action of gas depletion by heating expansion and gas replenishment from upstream.There are two kinds of oscillations,large and small amplitude oscillations,occurring in different discharge modes.This study could be a good verification of and complement to earlier experiments.This kind of spontaneous pulse phenomenon is also helpful in realizing a pulsing plasma source without a pulsed power supply.展开更多
We present the axial profiles of argon helicon plasma measured by a local optical emission spectroscope(OES) and Langmuir RF-compensated probe. The results show that the emission intensity of the argon atom lines(750 ...We present the axial profiles of argon helicon plasma measured by a local optical emission spectroscope(OES) and Langmuir RF-compensated probe. The results show that the emission intensity of the argon atom lines(750 nm, 811 nm) is proportional to the plasma density determined by the Langmuir probe. The axial profile of helicon plasma depends on the discharge mode which changes with the RF power. Excited by helical antenna, the axial distribution of plasma density is similar to that of the external magnetic field in the capacitive coupled mode(E-mode). As the discharge mode changes into the inductively coupled mode(H-mode), the axial distribution of plasma density in the downstream can still be similar to that of the external magnetic field, but becomes more uniform in the upstream. When the discharge entered wave coupled mode(W-mode), the plasma becomes nearly uniform along the axis, showing a completely different profile from the magnetic field. The W-mode is expected to be a mixed pattern of helicon(H) and Trivelpiece-Gould(TG) waves.展开更多
We present in this paper the comparison of an electric double layer(DL)in argon helicon plasma and magnetized direct current(DC)discharge plasma.DL in high-density argon helicon plasma of 13.56 MHz RF discharge was in...We present in this paper the comparison of an electric double layer(DL)in argon helicon plasma and magnetized direct current(DC)discharge plasma.DL in high-density argon helicon plasma of 13.56 MHz RF discharge was investigated experimentally by a floating electrostatic probe and local optical emission spectroscopy(LOES).The DL characteristics at different operating parameters,including RF power(300-1500 W),tube diameter(8-60 mm),and external magnetic field(0-300 G),were measured.For comparison,DL in magnetized plasma channel of a DC discharge under different conditions was also measured experimentally.The results show that in both cases,DL appears in a divergent magnetic field where the magnetic field gradient is the largest and when the plasma density is sufficiently high.DL strength(or potential drop of DL)increases with the magnetic field in two different structures.It is suggested that the electric DL should be a common phenomenon in dense plasma under a gradient external magnetic field.DL in magnetized plasmas can be controlled properly by magnetic field structure and discharge mode(hence the plasma density).展开更多
基金National Natural Science Foundation of China(No.11975047)。
文摘In this work,we investigated the discharge characteristics and heating mechanisms of argon helicon plasma in different wave coupled modes with and without blue core.Spatially resolved spectroscopy and emission intensity of argon atom and ion lines were measured via local optical emission spectroscopy,and electron density was measured experimentally by an RFcompensated Langmuir probe.The relation between the emission intensity and the electron density was obtained and the wavenumbers of helicon and’Trivelpiece-Gould’(TG)waves were calculated by solving the dispersion relation in wave modes.The results show that at least two distinct wave coupled modes appear in argon helicon plasma at increasing RF power,i.e.blue core(or BC)mode with a significant bright core of blue lights and a normal wave(NW)mode without blue core.The emission intensity of atom line 750.5 nm(lArⅠ750.5nm)is related to the electron density and tends to be saturated in wave coupled modes due to the neutral depletion,while the intensity of ion line 480.6 nm(IArⅡ480.6nm)is a function of the electron density and temperature,and increases dramatically as the RF power is increased.Theoretical analysis shows that TG waves are strongly damped at the plasma edge in NW and/or BC modes,while helicon waves are the dominant mechanism of power deposition or central heating of electrons in both modes.The formation of BC column mainly depends on the enhanced central electron heating by helicon waves rather than TG waves since the excitation of TG waves would be suppressed in this special anti-resonance region.
基金National Natural Science Foundation of China(No.11975047).
文摘We present here a kind of low-frequency oscillation in argon helicon discharge with a half helical antenna.This time-dependent instability shows a global quasi-periodic oscillation of plasma density and electron temperature,with a typical frequency of a few tens of Hz which increases with external magnetic field as well as radiofrequency(RF)power.The relative oscillation amplitude decreases with magnetic field and RF power,but the rising time and pulse width do not change significantly under different discharge conditions.The oscillation can only be observed in some specific conditions of low magnetic fields and low RF power when the gas flows in from one end of the discharge area and out from another end.This global instability is suggested to be attributed to the pressure instability of neutral depletion,which is the result of compound action of gas depletion by heating expansion and gas replenishment from upstream.There are two kinds of oscillations,large and small amplitude oscillations,occurring in different discharge modes.This study could be a good verification of and complement to earlier experiments.This kind of spontaneous pulse phenomenon is also helpful in realizing a pulsing plasma source without a pulsed power supply.
基金supported by National Natural Science Foundation of China (Nos. 11475131, 11805011)
文摘We present the axial profiles of argon helicon plasma measured by a local optical emission spectroscope(OES) and Langmuir RF-compensated probe. The results show that the emission intensity of the argon atom lines(750 nm, 811 nm) is proportional to the plasma density determined by the Langmuir probe. The axial profile of helicon plasma depends on the discharge mode which changes with the RF power. Excited by helical antenna, the axial distribution of plasma density is similar to that of the external magnetic field in the capacitive coupled mode(E-mode). As the discharge mode changes into the inductively coupled mode(H-mode), the axial distribution of plasma density in the downstream can still be similar to that of the external magnetic field, but becomes more uniform in the upstream. When the discharge entered wave coupled mode(W-mode), the plasma becomes nearly uniform along the axis, showing a completely different profile from the magnetic field. The W-mode is expected to be a mixed pattern of helicon(H) and Trivelpiece-Gould(TG) waves.
基金supported by National Natural Science Foundation of China(No.11975047)。
文摘We present in this paper the comparison of an electric double layer(DL)in argon helicon plasma and magnetized direct current(DC)discharge plasma.DL in high-density argon helicon plasma of 13.56 MHz RF discharge was investigated experimentally by a floating electrostatic probe and local optical emission spectroscopy(LOES).The DL characteristics at different operating parameters,including RF power(300-1500 W),tube diameter(8-60 mm),and external magnetic field(0-300 G),were measured.For comparison,DL in magnetized plasma channel of a DC discharge under different conditions was also measured experimentally.The results show that in both cases,DL appears in a divergent magnetic field where the magnetic field gradient is the largest and when the plasma density is sufficiently high.DL strength(or potential drop of DL)increases with the magnetic field in two different structures.It is suggested that the electric DL should be a common phenomenon in dense plasma under a gradient external magnetic field.DL in magnetized plasmas can be controlled properly by magnetic field structure and discharge mode(hence the plasma density).
