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基于强流离子源的离子束溅射镀膜设备均匀性优化
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作者 李桑丫 张艾霖 +3 位作者 †徐欣 吕涛 王世康 罗箐 《物理学报》 SCIE EI CAS CSCD 北大核心 2024年第5期325-333,共9页
随着高端光学器件镀膜的发展,其多样性溅射镀膜需求对离子束流流强、均匀度和可调性提出了更高的要求.对于新一代离子束溅射镀膜机来说,如何在不同离子比、不同流强的束流下保持足够的均匀度,成为了溅射镀膜设备的一大难题.本文提出了... 随着高端光学器件镀膜的发展,其多样性溅射镀膜需求对离子束流流强、均匀度和可调性提出了更高的要求.对于新一代离子束溅射镀膜机来说,如何在不同离子比、不同流强的束流下保持足够的均匀度,成为了溅射镀膜设备的一大难题.本文提出了一种基于三电极引出系统的优化模拟方法,模拟和优化了离子源的引出系统,研究了等离子体电极、抑制电极、引出电极的形状、角度、距离对离子束引出性能的影响.同时,重点研究了离子比对束流引出的影响.该模型可以指导科研工作者根据离子源的状态和应用需求,对三电极引出系统的角度、距离和形状进行系统优化并找出最优解.最后,本文还给出了一种方法对混合离子束的溅射深度进行了估算. 展开更多
关键词 溅射沉积镀膜 引出系统 自动优化 束流引出模拟
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低能强流注入器回顾(英文)
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作者 彭士香 陈佳 +7 位作者 任海涛 赵捷 徐源 张艾霖 张滔 罗宇霆 郭之虞 陈佳洱 《安徽师范大学学报(自然科学版)》 CAS 北大核心 2014年第3期205-211,共7页
为粒子加速器提供束流的装置称为注入器.提供的束流能量低于100 keV,流强在mA量级的注入器被定义为低能强流(LEHC)注入器.该种注入器具有结构简单,注入束流流强高以及束流调节方便等优点.本文将从结构及设计要点等方面对该类型注入器进... 为粒子加速器提供束流的装置称为注入器.提供的束流能量低于100 keV,流强在mA量级的注入器被定义为低能强流(LEHC)注入器.该种注入器具有结构简单,注入束流流强高以及束流调节方便等优点.本文将从结构及设计要点等方面对该类型注入器进行回顾. 展开更多
关键词 粒子注入器 低能束流输运段 离子源 电子回旋共振
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低能传输段空间电荷补偿效应(英文)
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作者 张艾霖 彭士香 +7 位作者 任海涛 张滔 张景丰 徐源 温佳美 武文斌 郭之虞 陈佳洱 《安徽师范大学学报(自然科学版)》 CAS 2016年第3期205-213,共9页
近些年来,随着基础科学和应用科学对强流加速器需求的日益增加,强流加速器得到了很大推广和发展.在强流加速器的低能段,空间电荷效应会导致束流发射度的增长,束流品质的变坏.这样的束流通常需要空间电荷补偿来控制空间电荷效应.空间电... 近些年来,随着基础科学和应用科学对强流加速器需求的日益增加,强流加速器得到了很大推广和发展.在强流加速器的低能段,空间电荷效应会导致束流发射度的增长,束流品质的变坏.这样的束流通常需要空间电荷补偿来控制空间电荷效应.空间电荷补偿是指束流可以通过吸收与束流电性相反的粒子从而减少束流空间电荷发散力的一种效应.北京大学自主开放了PIC-MCC空间电荷补偿模型,该模型被应用在H+和H-束流的空间电荷补偿模拟当中,且得到了与实验符合得比较好的结果. 展开更多
关键词 强流加速器 低能束流传输段 空间电荷效应 空间电荷补偿 PIC-MCC
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微型电子回旋共振离子源的全局模型 被引量:1
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作者 武文斌 彭士香 +7 位作者 张艾霖 周海京 马腾昊 蒋耀湘 李凯 崔步坚 郭之虞 陈佳洱 《物理学报》 SCIE EI CAS CSCD 北大核心 2022年第14期163-174,共12页
微型电子回旋共振(electron cyclotron resonance,ECR)离子源在紧凑型离子注入机、小型中子管、微型离子推进器等领域有着十分广泛的应用.为了深入认识微型ECR离子源的工作机理,本文以北京大学自主研制的一款微型氘离子源作为研究对象,... 微型电子回旋共振(electron cyclotron resonance,ECR)离子源在紧凑型离子注入机、小型中子管、微型离子推进器等领域有着十分广泛的应用.为了深入认识微型ECR离子源的工作机理,本文以北京大学自主研制的一款微型氘离子源作为研究对象,以氢气和氘气放电形成的等离子体为例,发展了一种基于粒子平衡方程的全局模型.研究结果表明,该离子源束流成分与离子源的运行气压和微波功率有着很强的依赖关系.对于氢气放电等离子体,微波功率低于100 W时,离子源可以分别在低气压和高气压情况下获得离子比超过50%的H_(2)^(+)离子束和H_(3)^(+)离子束;当微波功率高于100 W时,可以在很宽的运行气压范围内,获得质子比超过50%的束流.因此,提高微波功率是提高微型离子源质子比的关键.对于氘气放电等离子体,3种离子比例对运行气压和微波功率的依赖关系与氢气放电等离子体的规律基本一致.但是在相同的运行条件下,D^(+)比例比H^(+)比例高10%-25%.也就是说,在微型氘离子源的测试和优化过程中,可以利用氢气代替氘气进行实验,并将质子比测量结果作为相同条件下氘离子比例的下限. 展开更多
关键词 电子回旋共振离子源 等离子体模拟 离子比 中子源
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A fast emittance measurement unit for high intensity DC beam
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作者 张艾霖 任海涛 +7 位作者 彭士香 张滔 徐源 张景丰 温佳美 武文斌 郭之虞 陈佳洱 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第2期446-449,共4页
A combined unit, which has the ability to measure the current and emittance of the high intensity direct current(DC)ion beam, is developed at Peking University(PKU). It is a multi-slit single-wire(MSSW)-type bea... A combined unit, which has the ability to measure the current and emittance of the high intensity direct current(DC)ion beam, is developed at Peking University(PKU). It is a multi-slit single-wire(MSSW)-type beam emittance meter combined with a water-cooled Faraday Cup, named high intensity beam emittance measurement unit-6(HIBEMU-6). It takes about 15 seconds to complete one measurement of the beam current and its emittance. The emittance of a 50-mA@50-kV DC proton beam is measured. 展开更多
关键词 emittance measurement high intensity DC beam MSSW
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Continuous operation of 2.45-GHz microwave proton source for 306 hours with more than 50 mA DC beam 被引量:1
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作者 彭士香 张艾霖 +6 位作者 任海涛 张滔 徐源 张景丰 龚建华 郭之虞 陈佳洱 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第7期327-329,共3页
This paper describes a long-term operation of the 2.45-GHz microwave proton source at Peking University. The DC proton beam of 50–55 mA with energy of 35 keV has been run for 306 hours continuously. Total beam availa... This paper describes a long-term operation of the 2.45-GHz microwave proton source at Peking University. The DC proton beam of 50–55 mA with energy of 35 keV has been run for 306 hours continuously. Total beam availability,defined as 35-keV beam-on time divided by elapsed time, is higher than 99%. Water cooling machine failures cause all the downtime, and no plasma generator failure or high voltage breakdown is observed. The longest uninterrupted run time is122 hours. 展开更多
关键词 ECR ion source DC proton beam plasma generator failure high voltage breakdown
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New progress on beam availability and reliability of PKU high intensity CW proton ECR ion source 被引量:1
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作者 Shi-Xiang Peng Ai-Lin Zhang +6 位作者 Hai-Tao Ren Yuan Xu Tao Zhang Jing-Feng Zhang Jia-Mei Wen Zhi-Yu Guo Jia-Er Chen 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第2期345-348,共4页
The stability and reliability of an ion source and its beam availability are extremely significant for any accelerator,especially for those high current long term CW operation ones like ADS. Although the first high qu... The stability and reliability of an ion source and its beam availability are extremely significant for any accelerator,especially for those high current long term CW operation ones like ADS. Although the first high quality 306-hours continuous wave(CW) operating curve at 50 m A@35 ke V has been successfully obtained with a standard compact 2.45 GHz ECR ion source at Peking University(PKU), but the uncertainties that caused beam trips before are unacceptable during an accelerator real operation and should be eliminated. Meanwhile, no permission will be given when the beam power is upgraded from 50 m A@35 ke V to 50 m A@50 ke V. To improve the PKU CW proton source quality, several upgrades were done recently. After those improvements, a new long term CW proton beam experiment at 50 m A@50 ke V was carried out in June 2016. The total running time is 300.5 hours, including near 6 hours ion source preparation and 294 hours non-disturb continuous operation. Within the continuous 13 days operation, no beam-off happened, no spark was observed,no beam drop appeared, no interrupting action was needed, and only a few beam fluctuations caused by the air conditional failure occurred. Beam availability and reliability within the 294 hours is 100%. The root-mean-square(RMS) emittance of this 50 m A@50 ke V CW proton beam is about 0.186 π.mm.mrad. A careful inspection of the ion source was done after this long term operation and no obvious damage was found. The restart experimental results obtained after the ion source inspection prove the high repeatability of PKU PMECRIS. In addition, a 130-m A H+beam was obtained at 50 k V with duty factor of 10%(100 Hz/1 ms) with this source. Details will be presented in this paper. 展开更多
关键词 PKU PMECRIS 50mA@50keV CW proton beam 300-hours continuous operation no beam-off
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Surface enhancement of molecular ion H2+yield in a 2.45-GHz electron–cyclotron resonance ion source
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作者 徐源 彭士香 +7 位作者 任海涛 张艾霖 张滔 张景丰 温佳美 武文斌 郭之虞 陈佳洱 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第8期271-275,共5页
High current hydrogen molecular ion beam is obtained with a specially designed stainless steel liner permanent magnet2.45-GHz electron–cyclotron resonance(ECR) ion source(PMECR II) at Peking University(PKU). To... High current hydrogen molecular ion beam is obtained with a specially designed stainless steel liner permanent magnet2.45-GHz electron–cyclotron resonance(ECR) ion source(PMECR II) at Peking University(PKU). To further understand the physics of the hydrogen generation process inside a plasma chamber, theoretical and experimental investigations on the liner material of the plasma chamber in different running conditions are carried out. Several kinds of materials, stainless steel(SS), tantalum(Ta), quartz, and aluminum(Al) are selected in our study. Experimental results show that stainless steel and tantalum are much better than others in H~+_2 generation. During the experiment, an increasing trend in H~+_2 fraction is observed with stainless steel liner after O_2 discharge inside the ion source. Surface analyses show that the roughness change on the surface after O_2 discharge may be responsible for this phenomenon. After these studies, the pure current of H~+_2 ions can reach 42.3 mA with a fraction of 52.9%. More details are presented in this paper. 展开更多
关键词 H2+ ion source ECR 40 mA plasma
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Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University
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作者 武文斌 任海涛 +7 位作者 彭士香 徐源 温佳美 孙江 张艾霖 张滔 张景丰 陈佳洱 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第9期310-317,共8页
Optical emission spectroscopy(OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance(PMECR) ion sour... Optical emission spectroscopy(OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance(PMECR) ion source at Peking University(PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance(ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper. 展开更多
关键词 electron cyclotron resonance(ECR) ion source hydrogen plasma plasma diagnosis optical emission spectroscopy
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低能强流离子注入丁腈橡胶的表面改性(英文)
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作者 彭士香 张景丰 +7 位作者 徐源 任海涛 颜莎 张艾霖 张滔 赵捷 郭之虞 陈佳洱 《原子核物理评论》 CAS CSCD 北大核心 2015年第S1期47-51,共5页
丁腈橡胶是一种广泛使用的合成橡胶,目前应用于各种非轮胎制品。离子注入被认为是一种提高丁腈橡胶表面特性的有效手段,比如降低摩擦系数、提高耐抗性等。最近,为了理解辐照效应对于硫化橡胶的功能特性如摩擦系数和硬度等的影响,利用北... 丁腈橡胶是一种广泛使用的合成橡胶,目前应用于各种非轮胎制品。离子注入被认为是一种提高丁腈橡胶表面特性的有效手段,比如降低摩擦系数、提高耐抗性等。最近,为了理解辐照效应对于硫化橡胶的功能特性如摩擦系数和硬度等的影响,利用北京大学离子源测试平台将N^+和H^+注入丁腈橡胶表面进行研究。离子注入完成以后,对丁腈橡胶表面的摩擦系数、硬度、耐热老化性能、摩擦特性以及耐磨损性能进行了分析。 展开更多
关键词 丁腈橡胶 离子注入 表面改性
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