利用矩形薄板面内2个不同模态作为工作模态的直线型超声电机,其频率一致性和压电单元的布置方式以及激励方式对电机的性能和效率有重要的影响。该文根据电机定子的位移振型和应变振型详细分析了压电陶瓷的布置方式和激励方式,并利用参...利用矩形薄板面内2个不同模态作为工作模态的直线型超声电机,其频率一致性和压电单元的布置方式以及激励方式对电机的性能和效率有重要的影响。该文根据电机定子的位移振型和应变振型详细分析了压电陶瓷的布置方式和激励方式,并利用参数化有限元方法(finite element method,FEM)对定子结构进行优化设计。设计制作的样机,两相工作模态频率差为270Hz,在电压峰峰值为350V、驱动频率为44.16kHz、预压力为50N的情况下,电机最大空载速度为100mm/s,最大输出力为3N。展开更多
A two degrees of freedom (DOF) positioning stage using novel linear ultrasonic motors is presented. The stage mainly consists of two linear ultrasonic motors, linear guides and tables. It can realize the long stroke...A two degrees of freedom (DOF) positioning stage using novel linear ultrasonic motors is presented. The stage mainly consists of two linear ultrasonic motors, linear guides and tables. It can realize the long stroke and reversible controlled motion in two directions. The wheel-shape linear ultrasonic motor applied in the stage utilizes two fourth-bending modes of non-uniform beam in orthogonal directions. Quick response, no backlash, high resolution, power-off self-braking, and long stroke are the attractive characteristics of the linear positioning stage. Experimental results show that z and y-direction tables can reach the destination without overshoot and the error is less than 2μm by using two linear encoders with a resolution of 1 μm. In the open-loop mode, the positioning stage achieves 1μm resolution at 0. 25 ms driving time.展开更多
文摘利用矩形薄板面内2个不同模态作为工作模态的直线型超声电机,其频率一致性和压电单元的布置方式以及激励方式对电机的性能和效率有重要的影响。该文根据电机定子的位移振型和应变振型详细分析了压电陶瓷的布置方式和激励方式,并利用参数化有限元方法(finite element method,FEM)对定子结构进行优化设计。设计制作的样机,两相工作模态频率差为270Hz,在电压峰峰值为350V、驱动频率为44.16kHz、预压力为50N的情况下,电机最大空载速度为100mm/s,最大输出力为3N。
基金the National Natural Science Foundation of China (50735002)~~
文摘A two degrees of freedom (DOF) positioning stage using novel linear ultrasonic motors is presented. The stage mainly consists of two linear ultrasonic motors, linear guides and tables. It can realize the long stroke and reversible controlled motion in two directions. The wheel-shape linear ultrasonic motor applied in the stage utilizes two fourth-bending modes of non-uniform beam in orthogonal directions. Quick response, no backlash, high resolution, power-off self-braking, and long stroke are the attractive characteristics of the linear positioning stage. Experimental results show that z and y-direction tables can reach the destination without overshoot and the error is less than 2μm by using two linear encoders with a resolution of 1 μm. In the open-loop mode, the positioning stage achieves 1μm resolution at 0. 25 ms driving time.