The performance of optical interconnection has improved dramatically in recent years.Silicon-based optoelectronic heterogeneous integration is the key enabler to achieve high performance optical interconnection,which ...The performance of optical interconnection has improved dramatically in recent years.Silicon-based optoelectronic heterogeneous integration is the key enabler to achieve high performance optical interconnection,which not only provides the optical gain which is absent from native Si substrates and enables complete photonic functionalities on chip,but also improves the system performance through advanced heterogeneous integrated packaging.This paper reviews recent progress of silicon-based optoelectronic heterogeneous integration in high performance optical interconnection.The research status,development trend and application of ultra-low loss optical waveguides,high-speed detectors,high-speed modulators,lasers and 2D,2.5D,3D and monolithic integration are focused on.展开更多
采用离子交换法制备铒镱共掺磷酸盐波导光放大器,实验研究交换熔盐中的Ag离子浓度和交换时间对波导折射率和深度的影响.首先通过微电子的一些基本工艺制备8μm,10μm以及12μm宽度的Al条形掩模,并根据不同的AgNO_3浓度以及不同的交换时...采用离子交换法制备铒镱共掺磷酸盐波导光放大器,实验研究交换熔盐中的Ag离子浓度和交换时间对波导折射率和深度的影响.首先通过微电子的一些基本工艺制备8μm,10μm以及12μm宽度的Al条形掩模,并根据不同的AgNO_3浓度以及不同的交换时间得到不同的波导深度样品.然后在光学位移平台上对制备的条形波导进行测试,其中10μm宽,6μm深的条形波导的信号光输出功率为9μW,信号光净增益达3.0 d B/cm.展开更多
A 4×112 Gb/s hybrid-integrated optical receiver is demonstrated based on the silicon-photonic vertical p-i-n photodetector and silicon–germanium transimpedance amplifier.We propose a photonic-electronic co-desig...A 4×112 Gb/s hybrid-integrated optical receiver is demonstrated based on the silicon-photonic vertical p-i-n photodetector and silicon–germanium transimpedance amplifier.We propose a photonic-electronic co-design technique to optimize both the device-level and system-level performance,based on the end-to-end equivalent circuit model of the receiver.Continuous-time linear equalization and shunt peaking are employed to enhance the frequency response.Experimental results reveal that the optical-to-electrical 3-dB bandwidth of the receiver is 48 GHz.Clear open NRZ eye diagrams at56 Gb/s and PAM-4 eye diagrams at 112 Gb/s are achieved without an equalizer in the oscilloscope.The measured bit error rates for 56 Gb/s in NRZ and 112 Gb/s in PAM-4 reach 1×10^(-12)and 2.4×10^(-4)(KP4-FEC:forward error correction)thresholds under-4 dBm input power,respectively.Furthermore,the proposed receiver boasts a power consumption of approximately2.2 pJ/bit,indicating an energy efficient solution for data center traffic growth.展开更多
基金Project supported in part by the National Key Research and Development Program of China(Grant No.2021YFB2206504)the National Natural Science Foundation of China(Grant No.62235017)the China Postdoctoral Science Foundation(Grant No.2021M703125).
文摘The performance of optical interconnection has improved dramatically in recent years.Silicon-based optoelectronic heterogeneous integration is the key enabler to achieve high performance optical interconnection,which not only provides the optical gain which is absent from native Si substrates and enables complete photonic functionalities on chip,but also improves the system performance through advanced heterogeneous integrated packaging.This paper reviews recent progress of silicon-based optoelectronic heterogeneous integration in high performance optical interconnection.The research status,development trend and application of ultra-low loss optical waveguides,high-speed detectors,high-speed modulators,lasers and 2D,2.5D,3D and monolithic integration are focused on.
文摘采用离子交换法制备铒镱共掺磷酸盐波导光放大器,实验研究交换熔盐中的Ag离子浓度和交换时间对波导折射率和深度的影响.首先通过微电子的一些基本工艺制备8μm,10μm以及12μm宽度的Al条形掩模,并根据不同的AgNO_3浓度以及不同的交换时间得到不同的波导深度样品.然后在光学位移平台上对制备的条形波导进行测试,其中10μm宽,6μm深的条形波导的信号光输出功率为9μW,信号光净增益达3.0 d B/cm.
基金supported in part by the National Natural Science Foundation of China(NSFC)(Nos.62235017 and 62235015)the Young Elite Scientist Sponsorship Program(No.YESS20220688)the National Key Research and Development Program of China(No.2020YFB2205700)。
文摘A 4×112 Gb/s hybrid-integrated optical receiver is demonstrated based on the silicon-photonic vertical p-i-n photodetector and silicon–germanium transimpedance amplifier.We propose a photonic-electronic co-design technique to optimize both the device-level and system-level performance,based on the end-to-end equivalent circuit model of the receiver.Continuous-time linear equalization and shunt peaking are employed to enhance the frequency response.Experimental results reveal that the optical-to-electrical 3-dB bandwidth of the receiver is 48 GHz.Clear open NRZ eye diagrams at56 Gb/s and PAM-4 eye diagrams at 112 Gb/s are achieved without an equalizer in the oscilloscope.The measured bit error rates for 56 Gb/s in NRZ and 112 Gb/s in PAM-4 reach 1×10^(-12)and 2.4×10^(-4)(KP4-FEC:forward error correction)thresholds under-4 dBm input power,respectively.Furthermore,the proposed receiver boasts a power consumption of approximately2.2 pJ/bit,indicating an energy efficient solution for data center traffic growth.
