垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势,广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯(BCB)平整技术有效地降低了垂直腔面发射激光器...垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势,广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯(BCB)平整技术有效地降低了垂直腔面发射激光器的寄生电容。详细研究了BCB平整技术的最优工艺参数,为未来高速垂直腔面发射激光器的制造技术提供参考。低k值BCB平整垂直腔面发射激光器在7μm氧化孔径下3 d B小信号调制带宽可达15.2 GHz。展开更多
The maximum power conversion efficiencies of the top-emitting,oxide-confined,two-dimensional integrated 2×2 and4×4 vertical-cavity surface-emitting laser（VCSEL） arrays with the oxide-apertures of 6 μm,16 ...The maximum power conversion efficiencies of the top-emitting,oxide-confined,two-dimensional integrated 2×2 and4×4 vertical-cavity surface-emitting laser（VCSEL） arrays with the oxide-apertures of 6 μm,16 μm,19 μm,26 μm,29 μm,36 μm,39 μm,and 46 urn are fabricated and characterized,respectively.The maximum power conversion efficiencies increase rapidly with the augment of oxide-aperture at the beginning and then decrease slowly.A maximum value of27.91%at an oxide-aperture of 18.6 μm is achieved by simulation.The experimental data are well consistent with the simulation results,which are analyzed by utilizing an empirical model.展开更多
文摘垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势,广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯(BCB)平整技术有效地降低了垂直腔面发射激光器的寄生电容。详细研究了BCB平整技术的最优工艺参数,为未来高速垂直腔面发射激光器的制造技术提供参考。低k值BCB平整垂直腔面发射激光器在7μm氧化孔径下3 d B小信号调制带宽可达15.2 GHz。
基金supported by the National Natural Science Foundation of China(Grant Nos.61222501 and 61335004)the Specialized Research Fund for the Doctoral Program of Higher Education of China(Grant No.20111103110019)
文摘The maximum power conversion efficiencies of the top-emitting,oxide-confined,two-dimensional integrated 2×2 and4×4 vertical-cavity surface-emitting laser（VCSEL） arrays with the oxide-apertures of 6 μm,16 μm,19 μm,26 μm,29 μm,36 μm,39 μm,and 46 urn are fabricated and characterized,respectively.The maximum power conversion efficiencies increase rapidly with the augment of oxide-aperture at the beginning and then decrease slowly.A maximum value of27.91%at an oxide-aperture of 18.6 μm is achieved by simulation.The experimental data are well consistent with the simulation results,which are analyzed by utilizing an empirical model.
